Model:uGmni-300S|Sputtering System|Products|ULVAC, Inc.
Sputtering System

Model:uGmni-300S

Flexible configuration of up to six process chambers, depending on the core shape, enables this multi-chamber sputtering system to support a wide range of applications, including power devices, opto-devices, and RF devices.

Features

  • Compatible with various applications.
  • Substrate size:Up to Φ300mm.

Applications

  • Power device: seed and metal layer sputtering
  • MEMS sensor: PZT sputtering and etching
  • Optical device: VCSEL etching
  • Packaging: Descum ashing
  • Communication device: PE-CVD of insulated film and etching

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