ULVAC Research and Development
Promotion of Creation and Co-Creation of Innovation with Vacuum Technology as the Core
Development Policy
ULVAC is promoting innovative research and development activities centered on vacuum technology, contributing to the realization of a sustainable society. In recent years, as global investment in advanced semiconductors and electronic devices has accelerated, we regard co-creation with our customers as the most essential factor. The core of this co-creation is the Research & Development Headquarters.
The Research & Development Headquarters consists of two organizations: the Institute of Advanced Technology and the Future Technology Research Laboratory. At the Institute of Advanced Technology, we pursue higher functionality, reliability, and productivity of various equipment, advancing the development of innovative next-generation manufacturing technologies. At the Future Technology Research Laboratory, we are taking on challenges in promising next-generation technologies and exploring new application fields for vacuum technology.
These initiatives are strategically promoted in close collaboration with related divisions and group companies, with the aim of maximizing R&D resources and outcomes across the ULVAC Group.
Key Focus Areas
ULVAC is focusing on strengthening its technological capabilities in the semiconductor sectors of logic, memory, and power devices. In the logic and memory fields, based on our proven track record in the Metal Hard Mask process developed for cutting-edge logic devices, we are expanding into other processes and improving the performance of film deposition processes. Furthermore, to respond to ongoing miniaturization and high-level stacking in memory devices, we are accelerating the development of equipment and film deposition processes for new processes targeting DRAM and 3D NAND flash memory. In the field of power devices, which play a vital role in realizing an energy-efficient society, ULVAC is enhancing the development of ion implanters.
As semiconductor manufacturing technology continues to advance, close joint development with customers has become more important than ever. Through such co-creation, ULVAC strives to generate new technological value and contribute to global technological progress.
ULVAC's Global Research and Development Bases
