Research & Development

ULVAC Research and Development

We have provided products and materials based on vacuum technology that is essential to all industries. With our integrated group development organization, we create high value-added products and technologies through innovative and advanced technical development to meet the requirements of overseas device makers for speed, and to satisfy the actual and potential needs of our customers.

Research and Development Institutes

ULVAC possesses research and development institutes as its group's think tank in order to meet the latest process needs from their customers by providing solution from various points of view including equipment, processes and materials.

Technology History

ULVAC's technological milestones.

Technical Journal

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