Termination of Production and Maintenance|Support|ULVAC, Inc.
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Termination of Production and Maintenance

This is to disclose information such as the termination of sales and production of our company's products, upgrades, maintenance, etc. Please contact us using the address found at the end of each guideline.

[ Maintenance ]

Nov.2023

Sales termination Extreme High Vacuum Gauge AxTRAN

Sep. 2023

Sales termination RF Power Supply and Maching Box

Jul. 2023

Sales termination Extreme High Vacuum Gauge AxTRAN

Jul. 2023

End of support and maintenance related to Turbo-molecule Pump in Leak detector HELIOT 710 series

Jul. 2023

End of support and maintenance related to Leak detector HELIOT 700 series

May. 2023

Sales termination EB Gun Controller EGC-16S, EGC-16H, EGC-16G

Feb. 2023

Sales termination Oil Rotary Pump VD151 / VD201

Sep. 2022

Sales termination G-TRAN Series Pirani Gauge SW1 Series

Sep. 2022

Sales termination Crystal Oscillation Type Deposition Controller CRTM-9200

Aug.2022

End of support and maintenance related to vacuum pumps

Jul. 2022

Sales termination Turbo molecular pump UTM-FW/FH series

Jun. 2022

Business transfer of AFFINIX Series

Apr. 2022

Sales termination Meter for Pirani guage GP-1SRY

Apr. 2022

Notice of initial setting change of dry vacuum pump LR / HR / UR series

Mar. 2022

Sales termination Pirani Vacuum Gauge GP-2002G

Jan. 2022

Postponement of Sales Termination: QCM based Molecular Interaction Analyzer AFFINIX Series,Precise Microplate Paddle Mixer MICROPADDLE

Dec. 2021

Notice of model name change:All DC Power supply products(DPG series)

Dec. 2021

Sales termination of CCMT-D series Controller GM-2001_ GM-2002


[Supplement Material]Replacement of the ceramic capacitance manometers CCMT D series Controller GM 2001, GM 2002

Nov. 2021

Product Specification Change Notification DIS-251

Aug. 2021

Sales Termination: QCM based Molecular Interaction Analyzer AFFINIX Series,Precise Microplate Paddle Mixer MICROPADDLE

Jun. 2021

Sales termination Pirani Vacuum Gauge Conversion Conector

[Supplement Material]Sales termination of Conversion Connector(GP 1000 to GP 1000G)

Jun. 2021

Sales termination Optical Process Monitor Optius

Jun. 2021

The termination of manual(CD-R) attached with LS series pump

Apr. 19, 2021

Announcement of application date correction for "ULVAC Components News letter 896PY Change of standard vacuum oils to R-72 and R-42

Mar. 10, 2021

(Revised)Sales termination of G-TRAN Series Multi Ionization Gauge SH2 Series / ST2 Series

Feb. 18, 2021

Sales termination Non-contact Metal Film Thickness Measuremant System MESEC Series

Feb. 12, 2021

Sales termination of Metal Ionization Vacuum Gauge GI-M2

Feb. 12, 2021

Sales termination of G-TRAN Series Multi Ionization Gauge SH2 Series / ST2 Series

Feb. 01, 2021

Replace the standard Oil / ULVOIL for Vacuum Pump

Introduction of Oil Rotary Vacuum Pump oil ULVOIL R-72 and R-42

Jan. 2021

Product termination:DC power supply for sputtering DPG-30R

Oct. 2020

Sales termination DC exchanger DPG-MEX2M167A

Sep. 30, 2020 Termination Vacuum valve
Jun. 05, 2020 Trouble-of-HELIOT-900-Series-Tablet-Controller-Speaker
Mar. 10, 2020 How to connect QIP Cable for QuleeCGM051/052 QIP-PG
Feb. 27, 2020 Price Revision of Vacuum Gauge Sensor Head WI-PA
Jan. 30, 2020 Price Revision of Pirani Vacuum Gauge Sensor Head WPB Series
Dec. 09, 2019 Maintenance parts and Optional parts, of HELIOT100series
Dec. 09, 2019 Maintenance parts and Optional parts, of HELIOT300series
Jun. 2019

Sales termination Active ARC Killer A2KH-50

Aug. 15, 2018 Change of flange standard
Jun. 22, 2018 Notice on the change of material and pricee revision
Jun. 06, 2018 Material change of Pirani vacuum gauge sensor(WP-01/02/03)
May. 22, 2018 Parts of consumable parts and parts of mass spectrometer
Mar. 02, 2018 High Vacuum Robot 『COVOT-Z52』
Mar. 02, 2018 Compact High-speed Spectroscopic Ellipsometer UNECS-2000
Oct. 2017

Leak detector HELIOT300series

Regarding HELIOT series Signal Conversion Unit EXC-73

Feb. 01, 2017 Controller For Sputter ion pump:GST-07L Production termination
Aug. 01, 2016 Oil Filtration System Production and sales termination
Jun. 23, 2016 Crystal Oscillation type Deposition Controller CRTM-9200
Jun. 23, 2016 List Price Revision of Ionization Vacuum Gauge Sensor Head WIT,WIB and WIN
Dec. 01, 2015 Mechanical Booster Pump PMB-003C(M) sales termination
Aug. 05, 2015 Micro arc monitor sales termination
Jul. 15, 2015 List price revision of compact type partial pressure monitor MALIN's sensor head
Apr. 15, 2015 EB power generator HPS-1000F and EB gun controller EGC-10G sales termination
Mar. 27, 2015 AC Power generator_Sales termination
Jan. 27, 2015 Termination of Supplying Leak Detector "HELIOT 710 series"
Jun. 30, 2014 Announcement for Termination for Sales of Stylus Surface Profile measurement system for large FPD panel "NSPR Series"
Dec. 16, 2013 Notification for the end of touch panel replacement and repair for HELIOT700 series leak detector
Sep. 20, 2013 Information about back up data compatibility of the CRTM-9100G
Dec. 20, 2012 Bruker's Stylus Surface Profiler "Dektak 6M"
Announcing the termination of the supply of product service parts
Nov. 30, 2011 Direction for Safe Use of Oil Mist Trap
Feb. 05, 2010 Announcement for termination of Oil B-50K for Oil Diffusion Ejector pump, and for introducing substitution oil
Feb. 02, 2010 Notice for production termination of Ultra-high vacuum gauge GI-N8
Feb. 27, 2009 Veeco's Stylus Surface Profiler "Dektak V Series / Dektak OSP Series"
Announcing the termination of the supply of product service parts
Feb. 10, 2009 Caution for Pirani sensor WP series (RoHS version)
Jan. 05, 2009 Caution on exchanging heater unit of Diffusion Pump "ULK series"
Nov. 25, 2008 About Preventive Maintenance of Electrical/Electronic Componentes
Aug. 22, 2008 Veeco's Stylus Surface Profiler "Dektak3 Series"
Announcing the termination of the supply of product service parts
Jun. 16, 2008 Announcement on Problem of Our Calibrated Leaks During Air Transportation
May. 19, 2008 Safety Information on Motors in ULVAC Vacuum Pumps
Aug. 02, 2007 Deposition Monitor "FADM" and Crystal Deposition Controller "CRTM-7000/8000" Announcing the termination of the supply of product service parts
Jun. 06, 2006 Termination of Supplying the Power Supply Maintenance Board for Vacuum Tube Type Electron Beam Deposition
Mar. 10, 2006 Request Form for Repair/Inspection of ULVAC Components /Certificate of Contamination
Feb. 07, 2006 Announcement of change in standard connector for Vacuum Gauge.(G-TRAN/OCTIE)
Feb. 18, 2005 Termination in Sales and Manufacturing of Optional Parts for Old Models of CRTM Series
Jan. 28, 2005 Termination of Supplying maintenance parts for Vacuum tube power supply for electron beam evaporation
Oct. 19, 2004 Ionization Vacuum Gauge GI- TL3/GI-TL3RY Complimentary Repair Service
Sep. 03, 2004 Termination of Product Supply (CERATRON (R), Secondary Electron Multiplier)
Nov. 25, 2003 Termination of the supply of product service parts for Veeco's Stylus Surface Profiler "Dektak Series"

[ Termination of sales and production of our company's products ]

List in Product Model Note
Nov.2023

Sales termination Extreme High Vacuum Gauge AxTRAN

AxTRAN

Sale end date: 17th, November 2023
Successor model: None

Sep. 2023

Sales termination RF Power Supply and Maching Box

RF Power Supply
RFS-13100F
RFS-13150F
RFS-2750L
RFS-2775L

Matching Box
MBX-13100F
MBX-13150F
MBX-2750L
MBX-2775L

Sale end date: 9th August 2024
Successor model:
RF Power Supply:RFS-13200F

Matching Box:MBX-13200F

※There is no successor to the RFS-2750L,RFS-2775L,MBX-2750L,MBX-2775L

Jul. 2023

Sales termination Extreme High Vacuum Gauge AxTRAN

AxTRAN

Sale end date: 30th, June 2024
Successor model: None

Jul. 2023

End of support and maintenance related to Turbo-molecule Pump in Leak detector HELIOT 710 series

HELIOT 710 series

Sale end date: June 30, 2025
Successor model: Heliot 900 series

Jul. 2023

End of support and maintenance related to Leak detector HELIOT 700 series

HELIOT 700 series

Sale end date: June 30, 2025
Successor model: Heliot 900 series

May. 2023

Sales termination EB Gun Controller EGC-16S, EGC-16H, EGC-16G

EGC-16S, EGC-16H, EGC-16G

Sale end date: 8th, May 2023
Successor model: EGC-16GS-S, EGC-16GS-H, EGC-16GS-G

Feb. 2023

Sales termination Oil Rotary Pump VD151 / VD201

VD151,VD201

Sale end date: 30st, June 2023
Successor model: GLD-202AA, GLD-280A

Sep. 2022

Sales termination G-TRAN Series Pirani Gauge SW1 Series

SW1-1,SW1-2

Sale end date: SW1-1 : 31st, March 2023 / SW-1-2 : 31st, December 2022
SSuccessor model:SW-100 Series

Sep. 2022

Sales termination Crystal Oscillation Type Deposition Controller CRTM-9200

CRTM-9200

Sale end date: 31st, March 2023
Successor model: CRTM-R1

Jul. 2022

Sales termination Turbo molecular pump UTM-FW/FH series

UTM-FW/FH series

Sales Termination date: 28th, December 2022
Successor model: Scheduling to release on December 2022

Jun. 2022

Business transfer of AFFINIX Series

AFFINIX Series

Sales Termination date: 30th, June 2022
Transferred business to Piezo Parts Co.,Ltd.

Apr. 2022

Sales termination Meter for Pirani guage GP-1SRY

Meter for Pirani guage GP-1SRY

Sale end date: As soon as the present stock has run out
Successor model: None

Mar. 2022

Sales termination Pirani Vacuum Gauge

GP-2002G

Sale end date: 31th, August 2022
Successor model: SW1∔ISG1

Jan. 2022

QCM based Molecular Interaction Analyzer
Precise Microplate Paddle Mixer

AFFINIX Series
MICROPADDLE

Sale end date: June 30, 2022
Successor model: None

Dec. 2021

Sales termination of CCMT-D series Controller


Supplement Material

GM-2001_ GM-2002

Sale end date: 31th, December 2021

Successor model:1CH Display Unit ISG1

Aug. 2021

QCM based Molecular Interaction Analyzer

Precise Microplate Paddle Mixer

AFFINIX Series

MICROPADDLE

Sale end date: December 31, 2021

Successor model: None

Jun. 2021

Pirani Vacuum Gauge Conversion Conector

Supplement Material

GP-1000

Sale end date: May 30, 2022

Successor model: None

Jun. 2021

Optical Process Monitor Optius

Optius Series

Sale end date: December 31, 2021

Successor model: None

Mar. 2021

Multi Ionization Gauge

SH2-1/SH2-2

ST2-1/ST2-2

Sale end date: As soon as the present stock has run out
Successor model: SH200-A /SH200-R

Successor model: ST200-A/ST200-R

Feb. 2021

Non-contact Metal Film Thickness Measuremant System MESEC Series

MESEC-BIT3000
MESEC-BIT2000
MESEC-SAT2000
MESEC-SAT3000
Sale end date: March 2021
Successor model: None
Feb. 2021

Metal Ionization Vacuum Gauge

GI-M2 Sale end date: December 2021
Successor model: G-TRAN Series Multi Ionization Gauge SH200 Series
Feb. 2021

Multi Ionization Gauge

SH2-1/SH2-2 Sale end date: May 2021
Successor model: SH200-A /SH200-R
Feb. 2021

Multi Ionization Gauge

ST2-1/ST2-2 Sale end date: May 2021
Successor model: ST200-A/ST200-R
Feb. 2021

Standard Oil / ULVOIL for Vacuum Pump
Introduction of Oil Rotary Vacuum Pump oil ULVOIL R-72 and R-42

ULVOIL R-7
ULVOIL R-4

All purchases received from April 01, 2021.
Successor model:

ULVOIL R-7; ULVOIL R-72

ULVOIL R-4; ULVOIL R-42

Jan. 2021

DC power supply for sputtering

DPG-30R

Sale end date: As soon as the present stock has run out

Successor model: DPG-30H

Oct. 2020

Sales termination DC exchanger DPG-MEX2M167A

DPG-MEX2M167A

Sale end date: 31st. December 2020
Successor model: None

Aug. 2020 Vacuum valve High Vacuum Valve VAH series
High Vacuum Valve VAP series
Variable orifice VOP series
Direct Isolated Valve IAD series
Productions termination: March 2021
Jun. 2020 Leack Detector Heliot 300 Series Optional Parts Ion Source for Leakdetector 'HELIOT 300 series' IS-BA3 Productions termination: Junuary 2021
Succession model: Leak Detector HELIOT900series
Apr. 2020 Thermal desorption gas analyzer and the expendables - Productions termination: Junuary 2020
Dec. 2019 Reactive process gas monitor Qulee RGM-202/302 Productions termination: January 2020
Succession model: RGM2-202/302
Dec. 2019 Compact process gas monitor Qulee CGM-051/052 Productions termination: January 2020
Succession model: CGM2-202/302
Dec. 2019 Vacuum Gauge G-TRAN Series 4Ch Display Unit IM1R1/IM2R1 Productions termination: December 2020
Dec. 2019 Maintenance parts and Optional parts, of HELIOT100series for HELIOT100series Productions termination: December 2019
Dec. 2019 Maintenance parts and Optional parts, of HELIOT300series for HELIOT300series Productions termination: December 2019
Jul. 2019 Sensor head for ultra high vacuum gauge WIN-N1, WIN-N2, WIN-N3 Productions termination: January 2020
Jul. 2019 SEM for MSQ analysis tube for MSQ-150A/200, ST-200 Productions termination: January 2020
Jul. 2019 Ion sauce and filament for MSQ analysis tube for MSQ-150A/200/400, ST-200/400 Productions termination January 2020
Jul. 2019 Ion sauce and filament for MSQ analysis tube for MSQ-150A/200/400, ST-200/400 Productions termination: January 2020
Jul. 2019 Sensor head for compact type pertial pressure moitor MALIN(H-01/02/03) Productions termination: January 2020
Jul. 2019 Quadurupole Mass Spectrometer with Differential Pumping Kit Qulee with YTP Atmosperic pressure type Productions termination: August 2019
Succession model: Qulee with YTPーH Atmosperic pressure type
Jun. 2019

Sales termination Active ARC Killer A2KH-50

A2KH-50

Sale end date: 31st. December 2019
Successor model: Active ARC Killer A2K-20K

Feb. 2019 Quadurupole Mass Spectrometer with Differential Pumping Kit Qulee with YTP Productions termination: April 2019
Succession model: Qulee with YTPーH
Nov. 2018 High-performance process gas monitor Qulee HGM-202/302 Productions termination: December 2018
Succession model: HGM2-202/302
Nov. 2018 Basic process gas monitor Qulee BGM-101/102/201/202 Productions termination December 2018
Succession model: BGM2-101/102/201/202
Oct. 2018 Turbo Molecular Pump
Turbo Molecular Pumping System
UTM-50, 150, 300, 500, 1500
YTM-50M/SA, 150M/SA, 300M/SA, 500M/SA
Productions termination: June 2019
Succession model: Attached document
Aug. 28, 2018 DC power supply DCS0202B, DCS0402B Productions termination: March 2019
Succession model: Attached document
Aug. 28, 2018 DC exchanger PCL-MEX Series, PCL-EX Series Productions termination: March 2019
Succession model: Attached document
Aug. 28, 2018 EB power supply HPS-1000WF, EGC-10WF, EGC-10S Productions termination: September 2018
Succession model: Attached document
Aug. 28, 2018 EB power supply PSG-004S, PSG-004G Productions termination: September 2018
Succession model: Attached document
Aug. 2018 Wide range vacuum gauge , Octie/O-11/O-13/O-14/O-17 and Sensor cable Wide range vacuum gauge, Octie/O-11/O-13/O-14/O-17 and Sensor cable Productions termination: June 2019
Succession model: G-TRAN Series SW1/ISG1 package
Aug. 2018 Pirani vacuum gauge GP-1GRY B type/C type Pirani vacuum gauge GP-1GRY B type/C type Productions termination: March 2019
Succession model: GP-1GRY A type,
May. 2018 Parts of consumable parts and parts of mass spectrometer Parts of consumable parts and parts of mass spectrometer Productions terminatio:n December 2018
Dec. 2015 Mechanical Booster Pump PMB-003C(M) - Only Item in stock are available
- Succession machine: PMB300D(with INV)
Aug. 2015 Micro arc monitor MAM102 - Sales termination date: December 25, 2015
- Maintenance term: 7 years after sales termination.
- Succession machine:The current DC power supply is equipped with the arc count function.
Jul. 2015 Manual Ultra-High Vacuum Metal Valve (Conflat Flange Type) VUH-651C Sales termination
Jul. 2015 Ultra-High Vacuum Gate Valves VUGP series, VUGH series Sales termination
Jul. 2015 High Vacuum Gate Valves VAP series(8B~), VAH series(8B~) Sales termination
Apr. 2015 EB power generator/
EB gun controller
EB power generator HPS-1000F/
EB gun controller EGC-10G
Sales termination
Succession model: HPS-1000N/EGC-10GS
Mar. 2015 AC Power generator DC power generator part DPG-25, DPG-MC150/
Pulse unit part APG-50, APG-100, APG-CP
Sales termination
Jun. 2014 Leak Detector HELIOT 710 series Sales termination
Succession model: HELIOT 900
Jun. 2014 Stylus Surface Profile measurement system for large FPD panel NSPR-1300/1850/2400/2500/3000 Sales termination
Apr. 2013 Mechanical Booster Pump PMB-001C(M) Sales termination/
Succession model: PMB100D
Feb. 2013 Leak Tester HELIOT 101/102/102+/103 Sales termination/
Succession model: HELIOT 900, HELIOT ZERO
Jan. 2013 Analog Pirani Vacuum Gauge GP-2G/2GRY Productions termination: December 2013/
Succession model: GP-1G/1GRY/1000G, G-TRAN
Oct. 2012 G-TRAN Series Pirani Gauge Sensor Box Unit BPR2 Productions termination: March 2013/
Succession model: SPU/SP1/SW1-1/SW1-2 with G-TRAN SH2
Oct. 2013 G-TRAN Series Hot Cathode Gauge Box Unit BMR2 Productions termination: March 2013/
Succession model: G-TRAN SH2-1/SH2-2
Feb. 2012 Ionization Vacuum Gauge sensors WIT-G2/G3,
WIB-G6/G7,
WIN-G1/G2/G3/G5/G6/G7
Sales termination
We will continue supplying WIB-G5/N3 and WIN-N3 sensors.
Feb. 2012 Pirani Vacuum Gauge sensors WP-04/05/06 Sales termination
We will continue supplying WP-01/02/03/16 sensors.
Feb. 2012 Penning Vacuum Gauge GI-PA, GI-PARY, GI-PRYS Sales termination
Succession model: SC1
Feb. 2012 Pirani Vacuum Gauge GP-1GRY・D type Sales termination
Succession model:
GP-1GRY type
Jan. 2012 Stylus Surface Profiler Dektak 150 Sales termination/
Succession model: DektakXT
Oct. 2011 Turbo Molecular Pump UTM-M Series
(UTM-300M/UTM-500M/UTM-1500M)
Sales termination/
Succession model: UTM-FW Series
Oct. 2011 Vacuum tube for Electron Beam power supply E3072 (For HPS-1610F) Sales termination: December 2011
Jun. 2011 Oil-Sealed Rotary Vacuum Pump D-(D)K Series
(D-330K/D-650K/
D-950K/D-330DK/
D-650DK/D-950DK)
Sales termination/
Succession model: VD Series
Jun. 2011 Stylus Surface Profiler Dektak 8 Sales termination
Mar. 2011 Mechanical Booster Pump PMB-B Series
(PMB-040B/PMB-060B)
Sales termination/
Succession model:
PMB-040C/PMB-060C
Mar. 2011 Auto Ellipsometer ESM-1T/1AT Sales termination
Feb. 2011 Dry Vacuum Pump ER Series
(ER80/ER150/ER400/
ER600/ER1200)
Sales termination/
Succession model: LR/HR/UR Series
Jan. 2011 DC Power Supplies DCL Series
(DCL-100DUAL/
DCL-600/DCL-1000)
Sales termination
Sep. 2010 Pinpoint Pirani Vacuum Gauge Senser WP-1100A/1100B/
1100C/1100D/1100E
Sales termination
Repapering the filament is possible
Aug. 2010 Oil Mist Trap TMX-40/TMX-60/TMX-80/TM-80 Sales termination
Jun. 2010 Oil-Sealed Rotary Vacuum Pump EC Series
(EC403/EC603/EC803)
Sales termination/
Succession model: VD Series
Apr. 2010 Quadrupole Type Mass Spectrometer STANDAM・ST-400 Sales termination/
Succession model: HGM-302
Apr. 2010 Reactive Gas Process Monitoring system REPROS・RE-342/402 Sales termination/
Succession model: Qulee RGM
Apr. 2010 High Resolution Quadrupole Type Mass Spectrometer HIRESOM-2SM
Mar. 2010 Oil Diffusion Pump F-250,U-250
Feb. 2010 Oil Diffusion Ejector pump B-50K Only Item in stock are available/
Succession model: ULVOIL_B-6
Feb. 2010 Ultra-high vacuum gauge GI-N8 Sales termination/
Succession model:
AxTRAN, GI-M2, GI-D7
Sep. 2009 RF Power Supply RFS-A series / U series / RGN series Sales termination/
Succession model: RFS-L
Sep. 2009 Series Ceramic Capacitance Manometers CCMT-A/CCMH-A Sales termination
Succession model: CCMT-D
Sep. 2009 Crystal Oscillation type Deposition Controller CRTM-9000 Sales termination/
Succession model:
CRTM-9200
Mar. 2009 Oscillator for Crystal Oscillation type Deposition Controller OSC-12D Sales termination
Succession model: OSC-12DG
Mar. 2009 Crystal Oscillation type Deposition Controller CRTM-6000 Sales termination/
Succession model:
CRTM-6000G
Mar. 2009 Oil Rotary Pump D-240DK Sales termination/
Succession model: VD151
Dec. 2008 Oil Rotary Pump D-240DK Sales termination/
Succession model: VD151
Dec. 2008 Process gas monitor SEPION SE-100 Sales termination/
Succession model: Qulee HGM
Dec. 2008 Process gas monitor STANDAM ST200 Sales termination/
Succession model:
Qulee HGM
Dec. 2008 Leak Detector HELIOT700 series Sales termination/
Succession model: HELIOT 900
Oct. 2008 Oscillator for Crystal Oscillation type Deposition Controller OSC-12B Sales termination
Succession model: OSC-12BG
Sep. 2008 G-TRAN Series Display Unit ISP1/ISM1 Sales termination/
Succession model: ISG1
Sep. 2008 G-TRAN Series Display Unit ISP2/ISM2 Only Item in stock are available/
Succession model: ISG1
Sep. 2008 Ceramic Capacitance Manometer Controllers GM-1000 Sales termination/
Succession model: ISG1
Sep. 2008 OCTIE Sensor Unit/Box Unit Wide Range Vacuum Gauges SO1/BO1 Only Item in stock are available/
Succession model: SW1
Sep. 2008 OCTIE Display Unit for Wide Range Vacuum Gauges ISO2 Only Item in stock are available/
Succession model: ISG1
Aug. 2008 Analog Ionization Vacuum Gauges GI-TL3/TL3RY Sales termination/
Succession model: GI-D7
Jul. 2008 Compact Partial Pressure Monitor MALIN Sales termination/
Succession model: Qulee CGM
Dec. 2007 Stylus Surface Profiler Dektak 6M Sales termination
Dec. 2007 Sensor Head for Pirani Vacuum Gauge WPB-10-070
Apr. 2007 Analog Pirani Vacuum Gauge GP-2A/2ARY Sold until November 2007
Succession model: GP-1G/1GRY
Apr. 2007 Digital Pirani Vacuum Gauge GP-2001/2002 Sold until November 2007
Succession model:
GP-2001G/2002G
Mar. 2007 Turbo Molecular Pump control unit for UTM-1500/1500C 「T8」 Improvement of version [T8]/
Succession model [T9]: RoHS compliant
Mar. 2007 Turbo Molecular Pump control unit for UTM-500/500C/500M 「T8」 Improvement of version [T8]/
Succession model [T9]: RoHS compliant
Mar. 2007 Turbo Molecular Pump control unit for UTM-300/300C/300M 「T8」 Improvement of version [T8]/
Succession model [T9]: RoHS compliant
Mar. 2007 Turbo Molecular Pump control unit for UTM-150/150C 「T8」 Improvement of version [T8]/
Succession model [T9]: RoHS compliant
Mar. 2007 Turbo Molecular Pump control unit for UTM-50 「T6」 Improvement of version [T6]/
Succession model [T9]: RoHS compliant
Feb. 2007 Residual Gas Monitors REGA Succession model: Qulee BGM
Dec. 2006 Turbo Molecular Pump control unit for UTM-3500D 「D2」 Improvement of version [D2]/
Succession model [D3]: RoHS compliant
Dec. 2006 Turbo Molecular Pump control unit for UTM-6300FH 「D1」 Improvement of version [D1]/
Succession model [D3]: RoHS compliant
Dec. 2006 Turbo Molecular Pump control unit for UTM-FH series 「D1」 Improvement of version [D1]/
Succession model [D3]: RoHS compliant
Dec. 2006 Turbo Molecular Pump control unit for UTM-FW series 「D1」 Improvement of version [D1]/
Succession model [D3]: RoHS compliant
Jul. 2006 Analog Pirani Vacuum Gauge GP-1S/1SRY Succession model:
GP-1G/1GRY
Jul. 2006 Vacuum Valve VSHC Series Sales termination
Jun. 2006 Vacuum Valve VLHC Series Succession model:
VLH-US-KF, VLH-U, US
Jun. 2006 Vacuum Valve VLPC Series Succession machine:
VLP-US-KF, VLP-U/US
May. 2006 Digital Pirani Vacuum Gauge GP-1000 Succession model: GP-1000G
Sep. 2005 G-TRAN Series Display Unit IAP2
Jun. 2005 Quadrupole Type Mass Spectrometer MSQ-400
Jan. 2005 Sensor Head for Ionization Vacuum Gauge WIN-G1/G2/G3
(Change to WIN-G5/G6/G7)
Sold untill Junuary 2005
Nov. 2004 Induction Coil with Sensor Head o18/15
Oct. 2004 Sensor Head for Ionization Vacuum Gauge WI-K Only Items in Stock are available
Dec. 2003 RF power supply RFS-C Series
Dec. 2003 Matching Box MBX-C Series
Dec. 2003 Auto Matching controller for RF power supply AMC6D
Dec. 2003 Control Panel for RF power supply RFP Series
Dec. 2003 Stylus Surface Profiler Dektak OSP-1100
Nov. 2003 Stylus Surface Profiler Dektak V Series
Mar. 2003 Helium Leak Detector HELIOT300 Series
Mar. 2003 Dry Vacuum Pump PDR-060CL(H), 090CL(H),
180C
Dec. 2002 Electron Beam power supply HPS-1600
Dec. 2002 Stylus Surface Profiler Dektak 3 Series
Sep. 2002 Digital Type Ionization Vacuum Gauge GI-1000
Jul. 2002 High Vacuum L-Valve(Al) VLPA, VULPA Series
Apr. 2002 Arc monitor ARQUEST D-1000
Sep. 2001 Turbo Molecular Pump UTM-300FW Series
Sep. 2001 Turbo Molecular Pump UTM-700FW Series
Jul. 2001 Mechanical Booster Pump PMB-006C(M), PMB-012C(M)
May. 2001 Ionization Vacuum Gauge GI-D6
Apr. 2001 Turbo Molecular Pump UTM-1200FW Series
Apr. 2001 Turbo Molecular Pump UTM-2200FW Series
Apr. 2001 Turbo Molecular Pump UTM-3300FW Series
Jan. 2001 Digital Type Ultra-High Vacuum Gauge GI-N7
Oct. 2000 Ionization Vacuum Gauge GI-M
Oct. 2000 Leak Valve VLV-2
Jul. 2000 Quadrupole Type Mass Spctrometer MASSMATE-200
Apr. 2000 Pirani Vacuum Gauge GP-1SSW
Jan. 2000 DC power supply DCS1002B
Jan. 2000 Electron Beam power supply HPS-500
Dec. 1999 Digital Type Pirani Vacuum Gauge GP-1020
Dec. 1999 Pinpoint Pirani Vacuum Gauge GP-1100
Nov. 1999 Auto Ellipsometer ESM-1/1A
Oct. 1999 Auto Matching controller for RF power supply AMC5AR
Aug. 1999 Pirani Vacuum Gauge GP-2DA
Apr. 1999 Crystal Oscillation type Deposition Controller CRTM-7000, 8000
Feb. 1999 Stylus Surface Profiler Dektak 8000
Nov. 1998 Electron Beam power supply HPS-510L
Nov. 1998 Y axis power supply for Electron Beam power supply YPS-004
Jan. 1998 Crystal Oscillation type Deposition Contoroller CRTM-5000
Dec. 1997 Quadrupole Type Mass Spctrometer MASSMATE-100 Series
Dec. 1997 Dry Vacuum Pump PDR-090B
Nov. 1997 DC power supply DCS0402A8
Oct. 1997 Stylus Surface Profiler Dektak FPD-500, 650
Sep. 1997 DC power supply DCS1002C
Jul. 1997 DC power supply DCS0420A6
May. 1997 Active Arc Killer A2KF-50
May. 1997 Electron Beam power supply HPS-1000C2
Jan. 1997 Quadrupole Type Mass Spctrometer MSQ-101
Jan. 1997 Capacitance Manometer CCM-10000, CCMT-10000
Nov. 1996 Electron Beam power supply HPS-1000C
Sep. 1996 DC power supply DCS0202A
Sep. 1996 DC power supply DCS0202A6
Sep. 1996 DC power supply DCS0202A8
Aug. 1996 Electron Beam power supply HP-510C
Jun. 1996 Zero-Length Viewport TVU-FZ Series
May. 1996 Electron Beam power supply HPS-1610F
May. 1996 DC power supply DCS1002A
Apr. 1996 DC power supply DCS1001A
Mar. 1996 Helium Leak Detector DLMS-55 Supper Turbo
Mar. 1996 Electron Beam power supply HP-1010SG
Dec. 1995 Helium Leak Detector DLMS-33 Series(33, 33A, 33L, 33DYS)
DLMS-55 Supper
DLMS-SF Series(SF, SF2)
DLMS- QRT, QRT/TWIN TURBO
QRT-1
Nov. 1995 Digital Type Ultra-High Vacuum Gauge GI-N5
Nov. 1995 Dry Vacuum Pump PDR-090A, AD
Nov. 1995 Stylus Surface Profiler Dektak FPD-450
Oct. 1995 Electron Beam power supply HPS-1000
Aug. 1995 Helium Leak Detector DLMA-TP3 Series(TP3, TP3E, TP3F)
Jun. 1995 Ultra-high Vacuum Valve (Metal) VUH-1001C
Jun. 1995 Rotary Motion Feedthrough TDU-12F
Jun. 1995 Titanium Getter Pump PGT-12F
Jun. 1995 Titanium Getter Pump (Power Supply) GGT-1
Jun. 1995 Sorption Pump PSM-10, PSM-20B
Jun. 1995 Altain-Series Altain-Series without Gaskets and Bolts
Feb. 1995 Active Arc Killer A2K-ASK25
Jun. 1994 Electron Beam power supply HP-1010F
May. 1993 Stylus Surface Profiler Dektak 2A, 3030 Series
Mar. 1993 High Vacuum Gate Valve VAT(P)-U Series
Dec. 1992 Auto Matching controller for RF power supply AMC5DR
Sep. 1992 Turbo Molecular Pump Unit YTP-A Series
Feb. 1992 Stylus Surface Profiler Dektak 16000
Oct. 1991 Oil Rotaly Vacuum Pump EC402, 602, 801
Mar. 1991 Beam sweep controller PSG-004
Feb. 1991 Electron Beam power supply HP-1010FS
Jan. 1991 Electron Beam power supply HP-510C, HP-510CIII, HPS-500, HP-1010, HP-1010B, HP-1610, HP-1610F, HPS-1600
Sep. 1990 Quadrupole Type Mass Spctrometer MSQ-150A
Jun. 1990 Turbo Molecular Pump UTM-3000 Series
Apr. 1990 Crystal Oscillation type Deposition Contoroller CRTM-1000
Jan. 1990 Ionization Vacuum Gauge GI-K
Mar. 1989 Oil Rotaly Vacuum Pump D-330, 650, 950
D-330D, 650D, 950D
Dec. 1984 Quadrupole Type Mass Spctrometer MSQ-300
Mar. 1979 High Vacuum Gate Valve VAT-10 Series

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