This is to disclose information such as the maintenance and termination of sales and production of our company's products. Please contact us using the address found at the end of each guideline.
| List in | Product | Model | Note |
|---|---|---|---|
| May 2026 |
PBL-02 |
Sales end date: December 31, 2026 |
|
| Apr. 2026 |
DC-2 |
Sales end date: March 31, 2027 |
|
| Mar. 2026 |
Sales Termination of High-Speed Spectroscopic Ellipsometer UNECS |
UNECS-1M (W) |
Sales end date: June 30, 2026 |
| Nov. 2025 |
RFS-1305L |
Sales end date: June 30, 2026 |
|
| Sep. 2025 |
HELIOT ZERO |
Sales end date: December 31, 2025 |
|
| Jul. 2025 |
ULGR-X |
Sales end date: August 31, 2025 |
|
| Apr. 2025 |
DC Power Supply: ULstream 10K, 15K, 20K |
Sales end date: April 18, 2025 |
|
| Apr. 2025 |
Sales Termination of High-Frequency Power Supply (RF power supply) RFS-03D |
High-Frequency Power Supply (RF power supply): RFS-03D |
Sales end date: April 18, 2025 |
| Feb. 2025 |
Sales Termination of Matching Box for High-Frequency Power Supply (RF Power Supply) MBX-003M |
MBX-003M |
Sales end date: February 28, 2025 |
| Jan. 2025 |
Penning Gauge Sensor Head: WI-PA |
Sales end date: December 31, 2025 |
|
| May 2024 |
Sorption Pump: PSM Series |
Sales end date: June 28, 2024 |
|
| Apr. 2024 |
Blank flange |
Sales end date: September 30, 2024 |
|
| Mar. 2024 |
Production termination of Vacuum Transfer Robot COVOT-LC Series |
Vacuum Transfer Robot |
Production termination date: December 18, 2024 |
| Nov. 2023 |
AxTRAN |
Sales end date: November 17, 2023 |
|
| Oct. 2023 |
Pirani Vacuum Gauge: GP-1GRY(A) |
Sales end date: March 31, 2024 |
|
| Sep. 2023 |
RF Power Supply Matching Box |
Sales end date: August 9, 2024 Matching Box：MBX-13200F ※There is no successor to the RFS-2750L,RFS-2775L,MBX-2750L,MBX-2775L |
|
| Jul. 2023 |
AxTRAN |
Sales end date: June 30, 2024 |
|
| Jul. 2023 |
End of support and maintenance related to Turbo-molecule Pump in Leak detector HELIOT 710 Series |
HELIOT 710 Series |
Sales end date: June 30, 2025 |
| Jul. 2023 |
End of support and maintenance related to Leak detector HELIOT 700 Series |
HELIOT 700 Series |
Sales end date: June 30, 2025 |
| Jun. 2023 |
Cables for gauge head |
Sales termination date : July 31, 2023 |
|
| May 2023 |
Sales termination EB Gun Controller EGC-16S, EGC-16H, EGC-16G |
EGC-16S, EGC-16H, EGC-16G |
Sales end date: May 8, 2023 |
| Feb. 2023 |
VD151,VD201 |
Sales end date: June 30, 2023 |
|
| Sep. 2022 |
SW1-1,SW1-2 |
Sales end date: SW1-1: March 31, 2023 / SW-1-2: December 31, 2022 |
|
| Sep. 2022 |
Sales termination Crystal Oscillation Type Deposition Controller CRTM-9200 |
CRTM-9200 |
Sales end date: March 31, 2023 |
| Jul. 2022 |
UTM-FW/FH Series |
Sales Termination date: December 28, 2022 |
|
| Jun. 2022 |
AFFINIX Series |
Sales Termination date: June 30, 2022 |
|
| Apr. 2022 |
Meter for Pirani guage GP-1SRY |
Sales end date: As soon as the present stock has run out |
|
| Mar. 2022 |
GP-2002G |
Sales end date: August 31, 2022 |
|
| Jan. 2022 |
QCM based Molecular Interaction Analyzer |
AFFINIX Series |
Sales end date: June 30, 2022 |
| Dec. 2021 |
Sales termination of CCMT-D Series Controller |
GM-2001_ GM-2002 |
Sales end date: December 31, 2021 Successor model：1CH Display Unit ISG1 |
| Aug. 2021 |
AFFINIX Series MICROPADDLE |
Sales end date: December 31, 2021 Successor model: None |
|
| Jun. 2021 |
GP-1000 |
Sales end date: May 30, 2022 Successor model: None |
|
| Jun. 2021 |
Optius Series |
Sales end date: December 31, 2021 Successor model: None |
|
| Mar. 2021 |
SH2-1/SH2-2 ST2-1/ST2-2 |
Sales end date: As soon as the present stock has run out Successor model: ST200-A/ST200-R |
|
| Feb. 2021 |
Non-contact Metal Film Thickness Measuremant System MESEC Series |
MESEC-BIT3000 MESEC-BIT2000 MESEC-SAT2000 MESEC-SAT3000 |
Sales end date: March 2021 Successor model: None |
| Feb. 2021 | GI-M2 | Sales end date: December 2021 Successor model: G-TRAN Series Multi Ionization Gauge SH200 Series |
|
| Feb. 2021 | SH2-1/SH2-2 | Sales end date: May 2021 Successor model: SH200-A /SH200-R |
|
| Feb. 2021 | ST2-1/ST2-2 | Sales end date: May 2021 Successor model: ST200-A/ST200-R |
|
| Feb. 2021 |
Standard Oil / ULVOIL for Vacuum Pump |
ULVOIL R-7 |
All purchases received from April 1, 2021. ULVOIL R-7; ULVOIL R-72 ULVOIL R-4; ULVOIL R-42 |
| Jan. 2021 |
DPG-30R |
Sales end date: As soon as the present stock has run out Successor model: DPG-30H |
|
| Oct. 2020 |
DPG-MEX2M167A |
Sales end date: December 31, 2020 |
|
| Aug. 2020 | Vacuum valve | High Vacuum Valve VAH Series High Vacuum Valve VAP Series Variable orifice VOP Series Direct Isolated Valve IAD Series |
Productions termination: March, 2021 |
| Jun. 2020 | Leak Detector Heliot 300 Series Optional Parts | Ion Source for Leakdetector 'HELIOT 300 Series' IS-BA3 | Productions termination: January, 2021 Succession model: Leak Detector HELIOT 900 Series |
| Apr. 2020 | Thermal desorption gas analyzer and the expendables | - | Productions termination: January, 2020 |
| Dec. 2019 | Reactive process gas monitor | Qulee RGM-202/302 | Productions termination: January, 2020 Succession model: RGM2-202/302 |
| Dec. 2019 | Compact process gas monitor | Qulee CGM-051/052 | Productions termination: January, 2020 Succession model: CGM2-202/302 |
| Dec. 2019 | Vacuum Gauge G-TRAN Series 4Ch Display Unit | IM1R1/IM2R1 | Productions termination: December, 2020 |
| Dec. 2019 | Maintenance parts and Optional parts, of HELIOT 100 Series | for HELIOT 100 Series | Productions termination: December, 2019 |
| Dec. 2019 | Maintenance parts and Optional parts, of HELIOT 300 Series | for HELIOT 300 Series | Productions termination: December, 2019 |
| Jul. 2019 | Sensor head for ultra high vacuum gauge | WIN-N1, WIN-N2, WIN-N3 | Productions termination: January, 2020 |
| Jul. 2019 | SEM for MSQ analysis tube | for MSQ-150A/200, ST-200 | Productions termination: January, 2020 |
| Jul. 2019 | Ion sauce and filament for MSQ analysis tube | for MSQ-150A/200/400, ST-200/400 | Productions termination January, 2020 |
| Jul. 2019 | Ion sauce and filament for MSQ analysis tube | for MSQ-150A/200/400, ST-200/400 | Productions termination: January, 2020 |
| Jul. 2019 | Sensor head for compact type pertial pressure moitor | MALIN(H-01/02/03) | Productions termination: January, 2020 |
| Jul. 2019 | Quadurupole Mass Spectrometer with Differential Pumping Kit | Qulee with YTP Atmosperic pressure type | Productions termination: August, 2019 Succession model: Qulee with YTPｰH Atmosperic pressure type |
| Jun. 2019 |
A2KH-50 |
Sales end date: December 31, 2019 |
|
| Feb. 2019 | Quadurupole Mass Spectrometer with Differential Pumping Kit | Qulee with YTP | Productions termination: April, 2019 Succession model: Qulee with YTPｰH |
| Nov. 2018 | High-performance process gas monitor | Qulee HGM-202/302 | Productions termination: December, 2018 Succession model: HGM2-202/302 |
| Nov. 2018 | Basic process gas monitor | Qulee BGM-101/102/201/202 | Productions termination December, 2018 Succession model: BGM2-101/102/201/202 |
| Oct. 2018 | Turbo Molecular Pump Turbo Molecular Pumping System |
UTM-50, 150, 300, 500, 1500 YTM-50M/SA, 150M/SA, 300M/SA, 500M/SA |
Productions termination: June, 2019 Succession model: Attached document |
| Aug. 28, 2018 | DC power supply | DCS0202B, DCS0402B | Productions termination: March, 2019 Succession model: Attached document |
| Aug. 28, 2018 | DC exchanger | PCL-MEX Series, PCL-EX Series | Productions termination: March, 2019 Succession model: Attached document |
| Aug. 28, 2018 | EB power supply | HPS-1000WF, EGC-10WF, EGC-10S | Productions termination: September, 2018 Succession model: Attached document |
| Aug. 28, 2018 | EB power supply | PSG-004S, PSG-004G | Productions termination: September, 2018 Succession model: Attached document |
| Aug. 2018 | Wide range vacuum gauge , Octie/O-11/O-13/O-14/O-17 and Sensor cable | Wide range vacuum gauge, Octie/O-11/O-13/O-14/O-17 and Sensor cable | Productions termination: June, 2019 Succession model: G-TRAN Series SW1/ISG1 package |
| Aug. 2018 | Pirani vacuum gauge GP-1GRY B type/C type | Pirani vacuum gauge GP-1GRY B type/C type | Productions termination: March, 2019 Succession model: GP-1GRY A type, |
| May 2018 | Parts of consumable parts and parts of mass spectrometer | Parts of consumable parts and parts of mass spectrometer | Production termination: December, 2018 |
| Dec. 2015 | Mechanical Booster Pump | PMB-003C(M) | - Only Item in stock are available - Succession machine: PMB300D(with INV) |
| Aug. 2015 | Micro arc monitor | MAM102 | - Sales termination date: December 25, 2015 - Maintenance term: 7 years after sales termination. - Succession machine:The current DC power supply is equipped with the arc count function. |
| Jul. 2015 | Manual Ultra-High Vacuum Metal Valve (Conflat Flange Type) | VUH-651C | Sales termination |
| Jul. 2015 | Ultra-High Vacuum Gate Valves | VUGP Series, VUGH Series | Sales termination |
| Jul. 2015 | High Vacuum Gate Valves | VAP Series(8B~), VAH Series(8B~) | Sales termination |
| Apr. 2015 | EB power generator/ EB gun controller |
EB power generator HPS-1000F/ EB gun controller EGC-10G |
Sales termination Succession model: HPS-1000N/EGC-10GS |
| Mar. 2015 | AC Power generator | DC power generator part DPG-25, DPG-MC150/ Pulse unit part APG-50, APG-100, APG-CP |
Sales termination |
| Jun. 2014 | Leak Detector | HELIOT 710 Series | Sales termination Succession model: HELIOT 900 |
| Jun. 2014 | Stylus Surface Profile measurement system for large FPD panel | NSPR-1300/1850/2400/2500/3000 | Sales termination |
| Apr. 2013 | Mechanical Booster Pump | PMB-001C(M) | Sales termination/ Succession model: PMB100D |
| Feb. 2013 | Leak Tester | HELIOT 101/102/102+/103 | Sales termination/ Succession model: HELIOT 900, HELIOT ZERO |
| Jan. 2013 | Analog Pirani Vacuum Gauge | GP-2G/2GRY | Productions termination: December 2013/ Succession model: GP-1G/1GRY/1000G, G-TRAN |
| Oct. 2012 | G-TRAN Series Pirani Gauge Sensor Box Unit | BPR2 | Productions termination: March 2013/ Succession model: SPU/SP1/SW1-1/SW1-2 with G-TRAN SH2 |
| Oct. 2013 | G-TRAN Series Hot Cathode Gauge Box Unit | BMR2 | Productions termination: March 2013/ Succession model: G-TRAN SH2-1/SH2-2 |
| Feb. 2012 | Ionization Vacuum Gauge sensors | WIT-G2/G3, WIB-G6/G7, WIN-G1/G2/G3/G5/G6/G7 |
Sales termination We will continue supplying WIB-G5/N3 and WIN-N3 sensors. |
| Feb. 2012 | Pirani Vacuum Gauge sensors | WP-04/05/06 | Sales termination We will continue supplying WP-01/02/03/16 sensors. |
| Feb. 2012 | Penning Vacuum Gauge | GI-PA, GI-PARY, GI-PRYS | Sales termination Succession model: SC1 |
| Feb. 2012 | Pirani Vacuum Gauge | GP-1GRY･D type | Sales termination Succession model: GP-1GRY type |
| Jan. 2012 | Stylus Surface Profiler | Dektak 150 | Sales termination/ Succession model: DektakXT |
| Oct. 2011 | Turbo Molecular Pump | UTM-M Series (UTM-300M/UTM-500M/UTM-1500M) |
Sales termination/ Succession model: UTM-FW Series |
| Oct. 2011 | Vacuum tube for Electron Beam power supply | E3072 (For HPS-1610F) | Sales termination: December 2011 |
| Jun. 2011 | Oil-Sealed Rotary Vacuum Pump | D-(D)K Series (D-330K/D-650K/ D-950K/D-330DK/ D-650DK/D-950DK) |
Sales termination/ Succession model: VD Series |
| Jun. 2011 | Stylus Surface Profiler | Dektak 8 | Sales termination |
| Mar. 2011 | Mechanical Booster Pump | PMB-B Series (PMB-040B/PMB-060B) |
Sales termination/ Succession model: PMB-040C/PMB-060C |
| Mar. 2011 | Auto Ellipsometer | ESM-1T/1AT | Sales termination |
| Feb. 2011 | Dry Vacuum Pump | ER Series (ER80/ER150/ER400/ ER600/ER1200) |
Sales termination/ Succession model: LR/HR/UR Series |
| Jan. 2011 | DC Power Supplies | DCL Series (DCL-100DUAL/ DCL-600/DCL-1000) |
Sales termination |
| Sep. 2010 | Pinpoint Pirani Vacuum Gauge Senser | WP-1100A/1100B/ 1100C/1100D/1100E |
Sales termination Repapering the filament is possible |
| Aug. 2010 | Oil Mist Trap | TMX-40/TMX-60/TMX-80/TM-80 | Sales termination |
| Jun. 2010 | Oil-Sealed Rotary Vacuum Pump | EC Series (EC403/EC603/EC803) |
Sales termination/ Succession model: VD Series |
| Apr. 2010 | Quadrupole Type Mass Spectrometer | STANDAM・ST-400 | Sales termination/ Succession model: HGM-302 |
| Apr. 2010 | Reactive Gas Process Monitoring system | REPROS・RE-342/402 | Sales termination/ Succession model: Qulee RGM |
| Apr. 2010 | High Resolution Quadrupole Type Mass Spectrometer | HIRESOM-2SM | |
| Mar. 2010 | Oil Diffusion Pump | F-250,U-250 | |
| Feb. 2010 | Oil Diffusion Ejector pump | B-50K | Only Item in stock are available/ Succession model: ULVOIL_B-6 |
| Feb. 2010 | Ultra-high vacuum gauge | GI-N8 | Sales termination/ Succession model: AxTRAN, GI-M2, GI-D7 |
| Sep. 2009 | RF Power Supply | RFS-A Series / U Series / RGN Series | Sales termination/ Succession model: RFS-L |
| Sep. 2009 | Series Ceramic Capacitance Manometers | CCMT-A/CCMH-A | Sales termination Succession model: CCMT-D |
| Sep. 2009 | Crystal Oscillation type Deposition Controller | CRTM-9000 | Sales termination/ Succession model: CRTM-9200 |
| Mar. 2009 | Oscillator for Crystal Oscillation type Deposition Controller | OSC-12D | Sales termination Succession model: OSC-12DG |
| Mar. 2009 | Crystal Oscillation type Deposition Controller | CRTM-6000 | Sales termination/ Succession model: CRTM-6000G |
| Mar. 2009 | Oil Rotary Pump | D-240DK | Sales termination/ Succession model: VD151 |
| Dec. 2008 | Oil Rotary Pump | D-240DK | Sales termination/ Succession model: VD151 |
| Dec. 2008 | Process gas monitor | SEPION SE-100 | Sales termination/ Succession model: Qulee HGM |
| Dec. 2008 | Process gas monitor | STANDAM ST200 | Sales termination/ Succession model: Qulee HGM |
| Dec. 2008 | Leak Detector | HELIOT 700 Series | Sales termination/ Succession model: HELIOT 900 |
| Oct. 2008 | Oscillator for Crystal Oscillation type Deposition Controller | OSC-12B | Sales termination Succession model: OSC-12BG |
| Sep. 2008 | G-TRAN Series Display Unit | ISP1/ISM1 | Sales termination/ Succession model: ISG1 |
| Sep. 2008 | G-TRAN Series Display Unit | ISP2/ISM2 | Only Item in stock are available/ Succession model: ISG1 |
| Sep. 2008 | Ceramic Capacitance Manometer Controllers | GM-1000 | Sales termination/ Succession model: ISG1 |
| Sep. 2008 | OCTIE Sensor Unit/Box Unit Wide Range Vacuum Gauges | SO1/BO1 | Only Item in stock are available/ Succession model: SW1 |
| Sep. 2008 | OCTIE Display Unit for Wide Range Vacuum Gauges | ISO2 | Only Item in stock are available/ Succession model: ISG1 |
| Aug. 2008 | Analog Ionization Vacuum Gauges | GI-TL3/TL3RY | Sales termination/ Succession model: GI-D7 |
| Jul. 2008 | Compact Partial Pressure Monitor | MALIN | Sales termination/ Succession model: Qulee CGM |
| Dec. 2007 | Stylus Surface Profiler | Dektak 6M | Sales termination |
| Dec. 2007 | Sensor Head for Pirani Vacuum Gauge | WPB-10-070 | |
| Apr. 2007 | Analog Pirani Vacuum Gauge | GP-2A/2ARY | Sold until November 2007 Succession model: GP-1G/1GRY |
| Apr. 2007 | Digital Pirani Vacuum Gauge | GP-2001/2002 | Sold until November 2007 Succession model: GP-2001G/2002G |
| Mar. 2007 | Turbo Molecular Pump control unit for UTM-1500/1500C | 「T8」 | Improvement of version [T8]/ Succession model [T9]: RoHS compliant |
| Mar. 2007 | Turbo Molecular Pump control unit for UTM-500/500C/500M | 「T8」 | Improvement of version [T8]/ Succession model [T9]: RoHS compliant |
| Mar. 2007 | Turbo Molecular Pump control unit for UTM-300/300C/300M | 「T8」 | Improvement of version [T8]/ Succession model [T9]: RoHS compliant |
| Mar. 2007 | Turbo Molecular Pump control unit for UTM-150/150C | 「T8」 | Improvement of version [T8]/ Succession model [T9]: RoHS compliant |
| Mar. 2007 | Turbo Molecular Pump control unit for UTM-50 | 「T6」 | Improvement of version [T6]/ Succession model [T9]: RoHS compliant |
| Feb. 2007 | Residual Gas Monitors | REGA | Succession model: Qulee BGM |
| Dec. 2006 | Turbo Molecular Pump control unit for UTM-3500D | 「D2」 | Improvement of version [D2]/ Succession model [D3]: RoHS compliant |
| Dec. 2006 | Turbo Molecular Pump control unit for UTM-6300FH | 「D1」 | Improvement of version [D1]/ Succession model [D3]: RoHS compliant |
| Dec. 2006 | Turbo Molecular Pump control unit for UTM-FH Series | 「D1」 | Improvement of version [D1]/ Succession model [D3]: RoHS compliant |
| Dec. 2006 | Turbo Molecular Pump control unit for UTM-FW Series | 「D1」 | Improvement of version [D1]/ Succession model [D3]: RoHS compliant |
| Jul. 2006 | Analog Pirani Vacuum Gauge | GP-1S/1SRY | Succession model: GP-1G/1GRY |
| Jul. 2006 | Vacuum Valve | VSHC Series | Sales termination |
| Jun. 2006 | Vacuum Valve | VLHC Series | Succession model: VLH-US-KF, VLH-U, US |
| Jun. 2006 | Vacuum Valve | VLPC Series | Succession machine: VLP-US-KF, VLP-U/US |
| May 2006 | Digital Pirani Vacuum Gauge | GP-1000 | Succession model: GP-1000G |
| Sep. 2005 | G-TRAN Series Display Unit | IAP2 | |
| Jun. 2005 | Quadrupole Type Mass Spectrometer | MSQ-400 | |
| Jan. 2005 | Sensor Head for Ionization Vacuum Gauge | WIN-G1/G2/G3 (Change to WIN-G5/G6/G7) |
Sold until January, 2005 |
| Nov. 2004 | Induction Coil with Sensor Head | o18/15 | |
| Oct. 2004 | Sensor Head for Ionization Vacuum Gauge | WI-K | Only Items in Stock are available |
| Dec. 2003 | RF power supply | RFS-C Series | |
| Dec. 2003 | Matching Box | MBX-C Series | |
| Dec. 2003 | Auto Matching controller for RF power supply | AMC6D | |
| Dec. 2003 | Control Panel for RF power supply | RFP Series | |
| Dec. 2003 | Stylus Surface Profiler | Dektak OSP-1100 | |
| Nov. 2003 | Stylus Surface Profiler | Dektak V Series | |
| Mar. 2003 | Helium Leak Detector | HELIOT300 Series | |
| Mar. 2003 | Dry Vacuum Pump | PDR-060CL(H), 090CL(H), 180C |
|
| Dec. 2002 | Electron Beam power supply | HPS-1600 | |
| Dec. 2002 | Stylus Surface Profiler | Dektak 3 Series | |
| Sep. 2002 | Digital Type Ionization Vacuum Gauge | GI-1000 | |
| Jul. 2002 | High Vacuum L-Valve(Al) | VLPA, VULPA Series | |
| Apr. 2002 | Arc monitor | ARQUEST D-1000 | |
| Sep. 2001 | Turbo Molecular Pump | UTM-300FW Series | |
| Sep. 2001 | Turbo Molecular Pump | UTM-700FW Series | |
| Jul. 2001 | Mechanical Booster Pump | PMB-006C(M), PMB-012C(M) | |
| May 2001 | Ionization Vacuum Gauge | GI-D6 | |
| Apr. 2001 | Turbo Molecular Pump | UTM-1200FW Series | |
| Apr. 2001 | Turbo Molecular Pump | UTM-2200FW Series | |
| Apr. 2001 | Turbo Molecular Pump | UTM-3300FW Series | |
| Jan. 2001 | Digital Type Ultra-High Vacuum Gauge | GI-N7 | |
| Oct. 2000 | Ionization Vacuum Gauge | GI-M | |
| Oct. 2000 | Leak Valve | VLV-2 | |
| Jul. 2000 | Quadrupole Type Mass Spctrometer | MASSMATE-200 | |
| Apr. 2000 | Pirani Vacuum Gauge | GP-1SSW | |
| Jan. 2000 | DC power supply | DCS1002B | |
| Jan. 2000 | Electron Beam power supply | HPS-500 | |
| Dec. 1999 | Digital Type Pirani Vacuum Gauge | GP-1020 | |
| Dec. 1999 | Pinpoint Pirani Vacuum Gauge | GP-1100 | |
| Nov. 1999 | Auto Ellipsometer | ESM-1/1A | |
| Oct. 1999 | Auto Matching controller for RF power supply | AMC5AR | |
| Aug. 1999 | Pirani Vacuum Gauge | GP-2DA | |
| Apr. 1999 | Crystal Oscillation type Deposition Controller | CRTM-7000, 8000 | |
| Feb. 1999 | Stylus Surface Profiler | Dektak 8000 | |
| Nov. 1998 | Electron Beam power supply | HPS-510L | |
| Nov. 1998 | Y axis power supply for Electron Beam power supply | YPS-004 | |
| Jan. 1998 | Crystal Oscillation type Deposition Contoroller | CRTM-5000 | |
| Dec. 1997 | Quadrupole Type Mass Spctrometer | MASSMATE-100 Series | |
| Dec. 1997 | Dry Vacuum Pump | PDR-090B | |
| Nov. 1997 | DC power supply | DCS0402A8 | |
| Oct. 1997 | Stylus Surface Profiler | Dektak FPD-500, 650 | |
| Sep. 1997 | DC power supply | DCS1002C | |
| Jul. 1997 | DC power supply | DCS0420A6 | |
| May 1997 | Active Arc Killer | A2KF-50 | |
| May 1997 | Electron Beam power supply | HPS-1000C2 | |
| Jan. 1997 | Quadrupole Type Mass Spctrometer | MSQ-101 | |
| Jan. 1997 | Capacitance Manometer | CCM-10000, CCMT-10000 | |
| Nov. 1996 | Electron Beam power supply | HPS-1000C | |
| Sep. 1996 | DC power supply | DCS0202A | |
| Sep. 1996 | DC power supply | DCS0202A6 | |
| Sep. 1996 | DC power supply | DCS0202A8 | |
| Aug. 1996 | Electron Beam power supply | HP-510C | |
| Jun. 1996 | Zero-Length Viewport | TVU-FZ Series | |
| May 1996 | Electron Beam power supply | HPS-1610F | |
| May 1996 | DC power supply | DCS1002A | |
| Apr. 1996 | DC power supply | DCS1001A | |
| Mar. 1996 | Helium Leak Detector | DLMS-55 Supper Turbo | |
| Mar. 1996 | Electron Beam power supply | HP-1010SG | |
| Dec. 1995 | Helium Leak Detector | DLMS-33 Series(33, 33A, 33L, 33DYS) DLMS-55 Supper DLMS-SF Series(SF, SF2) DLMS- QRT, QRT/TWIN TURBO QRT-1 |
|
| Nov. 1995 | Digital Type Ultra-High Vacuum Gauge | GI-N5 | |
| Nov. 1995 | Dry Vacuum Pump | PDR-090A, AD | |
| Nov. 1995 | Stylus Surface Profiler | Dektak FPD-450 | |
| Oct. 1995 | Electron Beam power supply | HPS-1000 | |
| Aug. 1995 | Helium Leak Detector | DLMA-TP3 Series(TP3, TP3E, TP3F) | |
| Jun. 1995 | Ultra-high Vacuum Valve (Metal) | VUH-1001C | |
| Jun. 1995 | Rotary Motion Feedthrough | TDU-12F | |
| Jun. 1995 | Titanium Getter Pump | PGT-12F | |
| Jun. 1995 | Titanium Getter Pump (Power Supply) | GGT-1 | |
| Jun. 1995 | Sorption Pump | PSM-10, PSM-20B | |
| Jun. 1995 | Altain-Series | Altain-Series without Gaskets and Bolts | |
| Feb. 1995 | Active Arc Killer | A2K-ASK25 | |
| Jun. 1994 | Electron Beam power supply | HP-1010F | |
| May 1993 | Stylus Surface Profiler | Dektak 2A, 3030 Series | |
| Mar. 1993 | High Vacuum Gate Valve | VAT(P)-U Series | |
| Dec. 1992 | Auto Matching controller for RF power supply | AMC5DR | |
| Sep. 1992 | Turbo Molecular Pump Unit | YTP-A Series | |
| Feb. 1992 | Stylus Surface Profiler | Dektak 16000 | |
| Oct. 1991 | Oil Rotaly Vacuum Pump | EC402, 602, 801 | |
| Mar. 1991 | Beam sweep controller | PSG-004 | |
| Feb. 1991 | Electron Beam power supply | HP-1010FS | |
| Jan. 1991 | Electron Beam power supply | HP-510C, HP-510CIII, HPS-500, HP-1010, HP-1010B, HP-1610, HP-1610F, HPS-1600 | |
| Sep. 1990 | Quadrupole Type Mass Spctrometer | MSQ-150A | |
| Jun. 1990 | Turbo Molecular Pump | UTM-3000 Series | |
| Apr. 1990 | Crystal Oscillation type Deposition Contoroller | CRTM-1000 | |
| Jan. 1990 | Ionization Vacuum Gauge | GI-K | |
| Mar. 1989 | Oil Rotaly Vacuum Pump | D-330, 650, 950 D-330D, 650D, 950D |
|
| Dec. 1984 | Quadrupole Type Mass Spctrometer | MSQ-300 | |
| Mar. 1979 | High Vacuum Gate Valve | VAT-10 Series |
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