Vacuum tube power supply for electron beam evaporation Announcing the end of the supply of maintenance parts|News|ULVAC, Inc.
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2005.01.28
Product Termination and Maintenance

Vacuum tube power supply for electron beam evaporation Announcing the end of the supply of maintenance parts

Dear Customer,
We would like to take this opportunity to sincerely thank you for using our ULVAC products.

More than ten years have passed since our vacuum tube power supply for electron beam gun went out of production in 1991. Consequently, it has become very difficult to supply maintenance parts for vacuum tube power supplies for electron beam guns ("EB power supplies.")

While we will continue to offer a maintenance service for as long as possible, it is likely that the availability of repair parts for the vacuum tube EB power supplies will become increasingly limited. We would like to recommend that any customers still using this product replace it in the near future with the current type, the"solid state EB power supply."
We look forward to your continued support for our power supply products for film deposition in the future, and wish you every success in the future.

1.Models for which maintenance may be difficult

We have continued to provide maintenance services for the more common HP-1010F(FS), HP-1010SG, and HP-1610F models for more than ten years after their power supply units went out of production, by substituting in alternate parts and modifying the DRIVER board, which needs frequent repair. However, as the production of many parts has already finished due to recent changes in the way parts are produced, it is becoming impossible to use techniques such as modifying boards. We hope we can ask for your understanding.

This affects the following models.
● 5kW・・・HP-510C
●10kW・・・HP-1010F,HP-1010FS,HP-1010SG
●16kW・・・HP-1610F

2.Models for which no repair services are available

Repair services are, in principle, not performed for the following models, since twenty years have passed since they went out of production, and there are many parts which are impossible to obtain.
●10kW ・・・HP-1010,HP-1010B ●16kW・・・HP-1610

3.Alternative models

Model 5kW 10kW 16kW
Vacuum tube type HP-510,HP-510A,HP-510B
HP-510C,HP-510CIII
HP-1010,HP-1010B,HP-1010F
HP-1010FS,HP-1010SG
HP-1610
HP-1610F
Alternative model HPS-510S HPS-1000F HPS-1600F

As there may be some differences between vacuum tube models and current models, for example in I/O-related matters, please contact us for more details.

For further information

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