Introducing the dry etching technology required for the optical waveguide process.
… Process technology for Waveguide
Waveguide fabrication flow
An optical waveguide is a transmission line that uses light for communication. Quartz-based optical waveguides are basically manufactured using quartz-based glass film deposition technology and etching micromachining technology.
… Waveguide fabrication flow
Process technology for VCSEL
Introducing the dry etching technology required for the VCSEL process.
… Process technology for VCSEL
VCSEL fabrication flow
The market for semiconductor lasers is becoming active as a light source for 3D sensing technologies such as LiDAR, which are required for autonomous driving. As one of them, we will introduce a dry process for VCSELs (Vertical Cavity Surface Emitting Laser), which has merits such as miniaturization and energy saving.
… VCSEL fabrication flow
Process technology for μLED
Introducing the sputtering and etching technologies required for the μLED process.
… Process technology for μLED
μLED fabrication flow
μLED is a technology for refining LEDs used as light sources such as lighting and applying them to displays, and is expected as a technology to realize the next generation of displays of liquid crystal and organic EL. ULVAC provides technologies such as ITO sputtering and etching for the μLED manufacturing process.
… μLED fabrication flow
Process Technology for WLP
Introducing the sputtering, etching, and ashing technologies required for the WLP process.
… Process Technology for WLP
WLP fabrication flow
WLP is an abbreviation for Wafer Level Packaging, which is one of the mounting technologies expected as mobile devices such as smartphones become more sophisticated and thinner. ULVAC provides techniques such as sputtering, etching and ashing for the WLP manufacturing process.
… WLP fabrication flow
Process Technology Vox(IR sensor)
Introducing the Vox sputtering technology required for IR sensor production and the ashing technology required for sacrificial layer removal.
… Process Technology Vox(IR sensor)
Vox(IR sensor) fabrication flow
Infra-red sensor (IR-) is an important sensor for realizing visualization in the dark night, and it can detect the heat of the object, so it can visualize obstacles (animals with a heat source, etc.) even in the dark night.
… Vox(IR sensor) fabrication flow