IGZO Target

ULVAC manufactures and sells IGZO targets, which are used in IGZO TAOS (transparent amorphous oxide semiconductors composed of In, Ga, Zn, and O). ULVAC is working to increase the density of the targets and reduce the number of partitions to minimize particles, while delivering comprehensive packages that include high-quality IGZO targets, sputtering systems, and processes for IGZO to most display manufacturers around the world. ULVAC has also succeeded in developing a large IGZO target, approximately three meters long. This large IGZO target is expected to provide a fundamental solution to the degradation of TFT properties. In response to requests from display manufacturers, ULVAC has independently developed a high-mobility oxide semiconductor target, achieving a mobility approximately three times that of conventional IGZO targets (10 cm²/Vs).