Materials
ULVAC manufactures sputtering targets for various industrial fields and performs refining and precision processing of high-performance materials such as Ti, Ta, Nb, and Zr.
Sputtering Targets
To develop and produce high quality sputtering targets, ULVAC carefully evaluates which manufacturing method to use for each material to meet the product quality goals “Low particle” “Good film uniformity” “High usage efficiency”.
High Performance Materials
ULVAC performs welding processing (electron beam welding) such as Ta, Nb, Ti, Zr in the dry box highly managed the atmosphere or in the dry box under vacuum condition.
