Date： December 3rd (Wed.) to December 5th (Fri.)
Venue:Tokyo Big Sight East Hall 4, Tokyo, Japan
ULVAC Booth Location：4483
ULVAC exhibits our evolving solutions for semiconductor with high throughput and energy saving, including semiconductor production system "ENTRON Serives", our latest process technologies for STT-MRAM etc.
Also, we will exhibits the related products, like sputtering target for semiconductor, vacuum component, spectroscopic ellipsometer.
◇ Semiconductor Production / Sputtering System
◇ Vacuum Components/Measurement Instruments
Ellipsometer "UNECS Series"
Process Gas Monitor "Qulee Series"
Vaccum Gauge "SH2/CCMT Series"
Leak Detector "HELIOT900 Series"
Ceramic Ball Bearing Turbo Molecular Pump "UTM300B"
Dry Vacuum Pump "CR Series"
RF Power Generator "RFS Series"
DC Power generator "DPG Series"
◇ Electronic Equipment
We all really look forward to seeing you at our booth (#4483, East Hall 4), SEMICON JAPAN, TOKYO!
ULVAC, Inc. Components Division compo_info