Date： December 3rd (Wed.) to December 5th (Fri.)
10：00～17：00
Venue:Tokyo Big Sight East Hall 4, Tokyo, Japan
Official URL：http://www.semiconjapan.org/en/
ULVAC Booth Location：4483
ULVAC exhibits our evolving solutions for semiconductor with high throughput and energy saving, including semiconductor production system "ENTRON Serives", our latest process technologies for STT-MRAM etc.
Also, we will exhibits the related products, like sputtering target for semiconductor, vacuum component, spectroscopic ellipsometer.
◇ Semiconductor Production / Sputtering System
Multi-chamber Sputtering System "ENTRON Series"
A Batch System to Remove Native Oxide "RISE Series"
◇ Vacuum Components/Measurement Instruments
Ellipsometer "UNECS Series"
Process Gas Monitor "Qulee Series"
Vaccum Gauge "SH2/CCMT Series"
Leak Detector "HELIOT900 Series"
Ceramic Ball Bearing Turbo Molecular Pump "UTM300B"
Dry Vacuum Pump "CR Series"
RF Power Generator "RFS Series"
DC Power generator "DPG Series"
◇ Electronic Equipment
SiC Power Device Solution
High-temp Ion Implanter for SiC IH-860DSIC
◇ Materials
Sputtering Targets, Nanometal Ink
We all really look forward to seeing you at our booth (#4483, East Hall 4), SEMICON JAPAN, TOKYO!
ULVAC, Inc. Components Division compo_info
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