ULVAC at SEMICON Japan 2014 in Tokyo|News|ULVAC, Inc.
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ULVAC at SEMICON Japan 2014 in Tokyo

SEMICON Japan 2014

Date: December 3rd (Wed.) to December 5th (Fri.) 

Venue:Tokyo Big Sight East Hall 4, Tokyo, Japan

Official URL:http://www.semiconjapan.org/en/

ULVAC Booth Location:4483

The highlights

ULVAC exhibits our evolving solutions for semiconductor with high throughput and energy saving, including semiconductor production system "ENTRON Serives", our latest process technologies for STT-MRAM etc.
Also, we will exhibits the related products, like sputtering target for semiconductor, vacuum component, spectroscopic ellipsometer.

◇ Semiconductor Production / Sputtering System

 Multi-chamber Sputtering System "ENTRON Series"
 A Batch System to Remove Native Oxide "RISE Series"

◇ Vacuum Components/Measurement Instruments

 Ellipsometer "UNECS Series"
 Process Gas Monitor "Qulee Series"
 Vaccum Gauge "SH2/CCMT Series"
 Leak Detector "HELIOT900 Series"
 Ceramic Ball Bearing Turbo Molecular Pump "UTM300B"
 Dry Vacuum Pump "CR Series"
 RF Power Generator "RFS Series"
 DC Power generator "DPG Series"

◇ Electronic Equipment

 SiC Power Device Solution
 High-temp Ion Implanter for SiC IH-860DSIC

◇ Materials

 Sputtering Targets, Nanometal Ink

We all really look forward to seeing you at our booth (#4483, East Hall 4), SEMICON JAPAN, TOKYO!

For further information

ULVAC, Inc. Components Division compo_info

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