Integrated System
Model：LX-200
An integrated system capable of performing lithium vapor deposition and sputtering of various materials for rechargeable batteries. It is suitable for use at development sites.
Features
- Capable of sputtering in-situ before and after Li deposition.
- Space-saving design.
- Selectable DC and RF power sources for deposition materials.
- Capable of deposition on 200 mm square size substrates.
Applications
- Battery R&D
Specifications
| Model | LX-200E | LX-200S | LX-200ES | |
| Wafer Size(mm) | Max 200mm□ | |||
| Deposition area | Max 180mm□ | |||
| Configuration | 1) Loading/Unloading chambers | 1 | 1 | 1 |
| 2) Transfer chambers | 1 | 1 | 1 | |
| 3) Evaporation chambers (Crucible, Depo up) | 1 | - | 1 | |
| 4) Sputter chambers (Depo up, Max 4 cathodes) | - | 1 | 1 | |