Caution on exchanging heater unit of Diffusion Pump "ULK series"

Dear Customer,
We would like to take this opportunity to sincerely thank you for using our ULVAC products.

Regarding our oil diffusion pump "ULK series", we find a need for further safety instruction on exchanging the heater unit. We have prepared a full instruction of the procedure on our web system. Please download the necessary document before performing this task.
For any further questions, please contact your local ULVAC representatives.

ULK-04A、ULK-06A
"SK00-4787-DC-002-01 Heater Replacement Procedure.pdf"
(PDF:560kb)

ULK-10A、ULK-14A
"SK00-4802-DC-002-01 Heater Replacement Procedure.pdf"
(PDF:184kb)

■Applicable product

For further information

ULVAC, Inc. web_info