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2015.05.25 Maintenance: System Maintenance

2015.05.12 News: Our corporate profile movie has been newly released!

2015.04.08 News: ULVAC, Inc. and Robert Bosch GmbH Sign Basic Agreement for Joint Development of Piezoelectric Device (PZT) for MEMS -Sputtering Solution-

2015.03.25 News: World's first*, Low temperature PZT sputtering technology in mass production scale developed for piezoelectric MEMS device integrated on CMOS.

2015.02.25 News: New Addition to the HELIOT 900 Series Leak Detector Family - The HELIOT 904D4 with a big pump for testing very large volume objects

2015.01.27 Maintenance: Termination of Supplying Leak Detector "HELIOT 710 series"

2015.01.27 Product Termination and Maintenance: Termination of Supplying Leak Detector "HELIOT 710 series"

2015.01.09 Event: 2015 Events (Japan/Overseas)

2014.11.17 News: ULVAC-RIKO Starting to sell High Temperature Rapid Thermal Annealing System HT-RTA59HD

2014.11.14 News: ULVAC at SEMICON Japan 2014 in Tokyo

2014.10.27 News: The latest issue of Technical Journal No.78E is published.

2014.09.16 News: ULVAC to Launch Ceramic Ball Bearing Molecular Pump UTM300B -Compact size with integrated controller design and free mounting orientation

2014.07.03 News: ULVAC-RIKO Starting to sell "Thermoelectric Conversion Efficiency Evaluation System for Small Modules Mini-PEM"in the field of unutilized thermal energy thermoelectric generation technology development

2014.06.30 Product Termination and Maintenance: Announcement for Termination for Sales of Stylus Surface Profile measurement system for large FPD panel "NSPR Series"

2014.06.25 PR Magazine: PR Magazine No.64 (June 2014)

2014.06.22 Maintenance: Expanded the ISO/IEC 17025 calibration pressure range (JCSS: Japan calibration service system) to all the vacuum region from 133 kPa to 1e-4 Pa - thermal conductivity vacuum gauge, ionization vacuum gauge, diaphragm vacuum gauge, viscosity vacuum gauge -

2014.06.18 News: ULVAC to Launch New HELIOT 900 Series Leak Detectors -Improved Evacuation Capability and Usability for Faster Testing

2014.04.10 News: Launch of the Optius Optical Process Monitor -For Various Types of Plasma Processes-

2014.04.10 News: New Products Added to UNECS Series High Speed Spectroscopic Ellipsometers -Including a Distinctive Portable Type!-

2013.12.16 Maintenance: Notification for the end of touch panel replacement and repair for HELIOT700 series leak detector

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