EW Series models are deposition systems for evaporation of metal or oxides onto continuously-wound plastic film, paper or metal foil. Models range from compact types for research, to systems for mass-production. They can be used to manufacture products such as packaging materials, capacitors and magnetic tape.
EWA Series | EWE Series | EWD Series | |
Application | Packaging materials, gold/silver thread | Capacitors | |
Evaporation source | High-frequency induction heating | Resistance heating | |
Substrate material | PET, OPP, PVC, CPP and other macromolecular films, paper, metal foil, others | ||
Substrate size (width) | 3,000 mm max. | 670 mm max. | 670 mm max. |
Winding rate | 1,000 m/min max. | 1,200 m/min max. | |
Film thickness distribution | ±5% (varies according to deposition conditions) | ||
Film thickness monitors | Transmission monitor, eddy current monitor, contact-type resistance value monitor, others | ||
Pre-/post-process mechanisms | Substrate heating, AC/DC bombardment, RF bombardment, others | ||
Main evacuation systems | Oil diffusion pump, oil diffusion ejector pump |
EWD Series
EWE Series
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