Vacuum Evaporation System
Evaporation Roll CoaterEW Series
EW Series models are deposition systems for evaporation of metal or oxides onto continuously-wound plastic film, paper or metal foil. Models range from compact types for research, to systems for mass-production. They can be used to manufacture products such as packaging materials, capacitors and magnetic tape.
Features
- The substrate transfer system uses the latest winding control technology, ensuring stable transfer for every substrate material and size.
- Induction heating, resistance heating, and EB heating evaporation sources are available. The optimum source for the application can be selected.
- A wide range of pre- and post-process mechanisms are available to enable optimum process conditions.
- Film thickness monitors for online measurement are available (transmission film thickness monitor, eddy current film thickness monitor, resistance value monitor, others)
Applications
- Packaging materials, transparent gas barriers, gold/silver thread
- Capacitors
- Magnetic tape
- Optical films
仕様
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EWA Series | EWE Series | EWD Series |
| Application | Packaging materials, gold/silver thread | Capacitors | |
| Evaporation source | High-frequency induction heating | Resistance heating | |
| Substrate material | PET, OPP, PVC, CPP and other macromolecular films, paper, metal foil, others | ||
| Substrate size (width) | 3,000 mm max. | 670 mm max. | 670 mm max. |
| Winding rate | 1,000 m/min max. | 1,200 m/min max. | |
| Film thickness distribution | ±5% (varies according to deposition conditions) | ||
| Film thickness monitors | Transmission monitor, eddy current monitor, contact-type resistance value monitor, others | ||
| Pre-/post-process mechanisms | Substrate heating, AC/DC bombardment, RF bombardment, others | ||
| Main evacuation systems | Oil diffusion pump, oil diffusion ejector pump | ||
EWD Series
EWE Series
