ULVAC will be presenting on thin-film processing technologies of piezoelectoric materials for IoT/IoT applications at Micro Electro Mechanical Systems (IEEE MEMS 2020) in Vancouver.ULVAC will be presenting on thin-film processing technologies of piezoelectoric materials for IoT/IoT applications at Micro Electro Mechanical Systems (IEEE MEMS 2020) in Vancouver.
Title: "Thin-film Processing Technologies of Piezoelectoric Materials for IoT/IoE Applications"
Date: January 20 - 13:45 - 15:45 (M-70)
・ IEEE MEMS
https://www.mems20.org/
・ IEEE MEMS Program
https://www.mems20.org/program/MEMS2020_PreliminaryProgram.pdf
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