STMicroelectronics Establishes World's First "Lab-in-Fab" to Advance Adoption of Piezoelectric MEMS in Singapore in Partnership with A*STAR and ULVAC.
・ Media Center of STMicroelectronics
https://newsroom.st.com/media-center/press-item.html/t4293.html
・ ULVAC MEMS Device Solution
https://www.ulvac.co.jp/special/en/mems/
ULVAC, Inc. elec_info
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