Development and Commercialization of the Large Pendulum Valve "VFR-400" and "VFR-500" for the Organic EL Manufacturing and Large Vacuum Equipments|News|ULVAC, Inc.
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2011.08.29
News

Development and Commercialization of the Large Pendulum Valve "VFR-400" and "VFR-500" for the Organic EL Manufacturing and Large Vacuum Equipments

ULVAC, Inc. (Headquarters: Chigasaki, Kanagawa; President and CEO: Hidenori Suwa; hereinafter described as ULVAC) is pleased to announce that we have developed and commercialized large pendulum valves "VFR-400" and "VFR-500" for FPD manufacturing equipment such as organic EL (electroluminescent) manufacturing equipments and large vacuum equipments which will go on sale in September 2011.ULVAC, Inc. (Headquarters: Chigasaki, Kanagawa; President and CEO: Hidenori Suwa; hereinafter described as ULVAC) is pleased to announce that we have developed and commercialized large pendulum valves "VFR-400" and "VFR-500" for FPD manufacturing equipment such as organic EL (electroluminescent) manufacturing equipments and large vacuum equipments which will go on sale in September 2011.


【Background】

Vacuum chambers and vacuum pumps are isolated by vacuum valves in vacuum systems. "Angle valves" and "gate valves" are commonly used as vacuum valves. Pendulum valves that have feature of compactness and low vibration have now started being used as main valves in vacuum systems. Previously 6- to 14-inch pendulum valves have been mainstream, but as large pendulum valves are now being used in organic EL, LCD and other FPD processes, the demand for them is increasing.


【Overview】

Based on this situation, ULVAC developed and commercialized the Large Pendulum Valves VFR-400 and VFR-500 for these large vacuum equipments.Diameter of the newly developed Large Pendulum Valve "VFR-400" and "VFR-500" is 16 inches and20 inches.Features of these new products are as follows.

1. This product does not use a mechanical lock mechanism. A unique sealing mechanism realized low-vibration opening and closing movement (patent pending).

2. Maintainability was improved because it is possible to put on and take off its valve plate without removing its valve casing from vacuum systems.

【Sales and Future Development】

ULVAC will begin sales of the Large Pendulum Valve "VFR-400" and "VFR-500" in September. The price for the "VFR-400" is scheduled to be 1,380,000 yen, while the price of the "VFR-500" is 1,880,000 yen. The products are expected to be sold to domestic and overseas users of large-sized equipments and vacuum equipment manufacturers. ULVAC offers worldwide service support for both products. The initial sales target for the first year for both products is 1,000 units.

These newly announced Large Pendulum Valve "VFR-400" will be on display from August 31 (Wed.) to September 2 (Fri.), 2011 at the Japan Vacuum Show 2011, held at the Tokyo Big Sight (West Hall 1, Booth No. 8).

For further information

ULVAC, Inc. Components Division compo_info

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