ULVAC, Inc. will present research results on plasma optical emission spectroscopy, jointly with Institute of Science Tokyo, at the 47th International Symposium on Dry Process (DPS2026), organized by the Japan Society of Applied Physics, to be held at Plaza Heisei, Tokyo International Exchange Center, from November 19 to 20, 2026.
| Conference | 47th International Symposium on Dry Process (DPS2026) |
|---|---|
| Dates | November 19-20, 2026 |
| Venue |
Plaza Heisei, Tokyo International Exchange Center (Koto-ku, Tokyo)
|
Poster Presentation
| Date & Time |
Friday, November 20, 2026, 16:30 - 18:30 (JST)
|
|---|---|
| Session |
Plasma Diagnostics and Monitoring Systems
|
| Presentation Title |
On the selection of objective functions to deduce electron temperature and density from OES measurement with the help of CR model
|
| Affiliation |
1. Institute of Science Tokyo 2. ULVAC, Inc.
|
Related External Site
For further information
ULVAC, Inc. web_info
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