ULVAC, Inc. will present at SSDM2026, to be held in Nagasaki City, Nagasaki Prefecture, Japan, from September 14 to 17, 2026.
|
Conference Name
|
2026 International Conference on Solid State Devices and Materials (SSDM2026) |
|---|---|
| Date |
September 14-17, 2026
|
| Venue | Dejima Messe Nagasaki (Nagasaki City, Nagasaki Prefecture, Japan) |
Poster Presentation
| Date & Time | September 16, 2026 | 15:00-16:00 |
|---|---|
| Session Room | Room F |
| Session | |
| Presentation Title | Cu Resistivity Reduction by Ta Surface Oxidation Control Based on In-situ XPS Analysis |
| Affiliation |
1. ULVAC, Inc., 2. ULVAC-PHI, Inc., 3. Institute of Science Tokyo
|
External Links
For further information
ULVAC, Inc. web_info
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