Invited Presentation at VASSCAA-13 & KVS 2026

ULVAC, Inc. will give an invited presentation at The 13th Vacuum and Surface Sciences Conference of Asia and Australia & The 71st Korean Vacuum Society Summer Conference (VASSCAA-13 & KVS 2026), to be held in Gyeongju, Korea, from August 23 to 27, 2026.

Date	August 23-27, 2026 (KST)
Location	HICO (Gyeongju Hwabaek Convention Center), Gyeongju, Korea

Invited Presentation

Date & Time	August 25 (Tue), 2026, 15:30-16:00 (KST)
Session	08. Plasma Science & Techniques II
Presentation Title	TuJ3-1 \| Tailoring High-Density Plasmas for Cutting-Edge Semiconductor Process Applications
Abstract	As device scaling reaches physical and economic limits, semiconductor manufacturing increasingly relies on plasma processes that provide precise patterning and interface control with minimal damage. This presentation introduces ULVAC's strategy for tailoring high-density plasmas through plasma source selection and equipment-level optimization. The presentation highlights three plasma schemes: DC magnetron plasma for controlled flux and high-aspect-ratio sputter deposition; surface-wave plasma, engineered for radical downflow and optionally combined with CCP for mild anisotropic descum and bonding activation; and neutral-loop discharge plasma for low-pressure, low-Te, high-rate, low-damage processing for CPO photonic structures.

Date & Time	August 26 (Wed), 2026, 14:15-14:45 (KST)
Session	05. Electronic Materials & Processing VI
Presentation Title	WeA2-2 \| Voltage-Controlled Skyrmion Brownian Devices with Zero- or Ultralow-Energy Consumption
Abstract	Magnetic skyrmions exhibit random Brownian motion driven by thermal fluctuations and are promising for low-power information processing. This talk presents voltage-controlled skyrmion Brownian devices and demonstrates their potential for information-processing devices operating with zero or ultralow energy consumption.

External Links

VASSCAA-13 & KVS 2026　https://vasscaa-13.org/

For further information

ULVAC, Inc.　web_info