ULVAC will be presenting on the newest of plasma technology to fabricate advanced packaging at ECTC 2022.
Date | May 31 - June 3, 2022 |
Title 1 | The investigation of dry plasma technology in each steps for the fabrication of high performance redistribution layer |
Title 2 | A novel plasma process for build-up film in the fine wiring fabrication |
Details information on the presentations, including session number, presentation schedule, and authors, will be published in vacuum magazines, as soon as we receive it from ECTC.
https://www.ulvac.co.jp/wiki/en/process_g_ectc2022/
- Ashing
https://www.ulvac.co.jp/en/products/ashing_system/index.html
- Packaging
https://www.ulvac.co.jp/en/products/applications/advanced_packaging_device/index.html
- Details(Vacuum Magazine)
https://www.ulvac.co.jp/wiki/en/process_g_ectc2022/
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