Company History

Our company was founded in 1952 for the purpose of importing and selling various types of vacuum systems, and it concluded a general agent agreement with NRC Equipment Corporation, a U.S. company, for technical cooperation in the future. Main events after the foundation are as described below.

1952 August Japan Vacuum Engineering Co., Ltd. was founded (capital: 6 million yen) for the purpose of importing and selling various types of vacuum equipment.
1955 April Established the Omori Plant to start manufacturing equipment in Japan.
1956 November Merged with Toyo Seiki Vacuum Research Corporation and started manufacturing standard goods such as vacuum chemical processing equipment and vacuum pump at the Amagasaki Plant.
1959 April The Head Office and Omori Plant were moved to Yokohama City.
1961 July Started the vacuum metallurgy business by making use of the basics of vacuum technologies.
1962 September Established Vacuum Materials,Inc. (the company name was changed to ULVAC Materials, Inc.) to start selling fire-resistant materials.
1962 October Established SHINKU-RIKO Inc. (currently ADVANCE RIKO, Inc.) as a specialist manufacturer of thermal analyzers.
1963 October Was absorbed into SHINSEI SANGYO Inc. (founded on September 20, 1929). The company name was changed to Japan Vacuum Engineering Co., Ltd. on the merger day to continue business operations of the former Japan Vacuum Engineering Co., Ltd.
1964 January Separated the Reliance Department of the Overseas Division and established Reliance Electric Limited, which was jointly invested in by Reliance Electric and Engineering Co., a U.S. company.
1964 July Established Hong Kong ULVAC Co., Ltd.
1966 April Established Vacuum Metallurgical Co., Ltd. by spinning off the ULVAC Vacuum Metallurgical Department.
1968 May The Head Office and Yokohama Plant were moved to Chigasaki City.
1970 July Established Sanwa ULVAC Sales,Inc. (the company name was changed to ULVAC Higashi Nippon Co., Ltd.), a special agent that made exclusive use of our products.
1971 July Established SHINKU KIKO Inc. (currently, ULVAC KIKO Inc.) as a specialist manufacturer of compact vacuum pumps.
1972 July Established the Institute for Super Materials in Chiba.
1975 December Established ULVAC North America Corp. (currently, ULVAC Technologies, Inc.), a subsidiary in North America, as a base for export to the U.S.
1977 January Established KYUSYU ULVAC CORPORATION (currently, ULVAC KYUSHU CORPORATION) to expand sales activities in the Kyushu area.
1979 January Separated the Service Department to establish ULVAC SERVICE CORPORATION. Separated the SI Division to establish ULVAC COATING CORPORATION.
1981 October Established ULVAC CRYOGENICS INCORPORATED, a company co-founded with Helix Technology Corp., a U.S. company.
1982 January Established ULVAC TAIWAN Co., Ltd. (currently, ULVAC TAIWAN INC.) in Taipei City, Taiwan.
1982 November Established ULVAC-PHI, Inc., a company jointly invested in by U.S. company PerkinElmer Inc.
1982 December Established the Tsukuba Institute for Super Materials in Tsukuba Science City (currently Tsukuba City), Ibaraki Prefecture.
1983 February Set up the Beijing Office in Beijing, China.
1985 March Delivered an evacuation system for the “JT-60” nuclear fusion break-even plasma experiment system.
1985 April Established ULVAC Seiki Co., Ltd. as a base plant in the Kansai area.
1987 January Established ULVAC TOHOKU, Inc. in Hachinohe City, Aomori Prefecture, to strengthen large equipment production.
1987 February Established ULVAC GmbH in West Germany to improve services in Europe.
1987 May Established ULVAC CORPORATE CENTER Ltd. to support group companies.
1987 September Changed the company name in English to ULVAC Japan, Ltd.
1988 October Established Kyushu Vacuum Engineering Co., Ltd. in Kagoshima to mass produce vacuum pumps.
1990 May Established the Fuji Susono Plant in Susono City, Shizuoka Prefecture, to improve chip making equipment.
1991 December Kyushu Vacuum Engineering Co., Ltd. merged with ULVAC Seiki Co., Ltd. The company name was changed to ULVAC Seiki Co., Ltd.
1992 April Increased capital to 3.83 billion yen from 1.21 billion yen.
1992 June Increased capital to 3.85 billion yen.
1994 October ULVAC SERVICE CORPORATION merged with ULVAC Materials, Inc. The company name was changed to ULVAC TECHNO, Ltd.
1995 May Established ULVAC KOREA, Ltd. in Seoul, South Korea.
1995 September Established ULVAC (NINGBO) Co., Ltd., a joint venture with Ningbo C.S.I. Power & Machinery Group Co.,Ltd., in China.
1996 November Added clean plants in ULVAC TOHOKU, Inc. and the Kagoshima Office of ULVAC KYUSHU CORPORATION to improve the capacity for producing vacuum equipment.
1998 January Set up the Singapore CS Center and the Taiwan Hsinchu R&D Center to expand the network in Asia.
2000 April Set up the Taipei Wugu Service Center.
2000 August Constructed the Pyeongtaek Plant as a production plant of ULVAC KOREA, Ltd.
2001 May Constructed a new plant of ULVAC (NINGBO) Co., Ltd.
2001 July Changed the company name to ULVAC, Inc.
2001 November Established the Taoyuan CIP Plant of ULVAC TAIWAN INC. to improve customer support.
2002 January Established ULVAC SINGAPORE PTE LTD to improve customer support.
2002 July ULVAC Higashi Nippon Co., Ltd. merged with Takayama ULVAC Co.,Ltd. and changed the company name to ULVAC EQUIPMENT SALES, Inc.
2002 December Acquired stocks (50%) of ULVAC-PHI, Inc. that Physical Electronics USA, Inc., a U.S. company, owned in order to wholly own ULVAC-PHI, Inc.
2003 March Acquired stocks (31%) of Reliance Electric Limited from RELIANCE ELECTRIC COMPANY in the U.S. to increase the share to 81%.
2003 May Constructed a seamless plant for machining, surface treatment, and precision wet cleaning by ULVAC TOHOKU, Inc., ULVAC TECHNO, Ltd., and ULVAC Materials Technology Co., Ltd. in the Tohoku area.
2003 July Established ULVAC (SUZHOU) CO., LTD. as a full-scale production and CS solution plant in China.
2003 August Acquired stocks (50%) of Litrex Corporation, which manufactured and sold industrial ink jet printers.
2004 April Joined the 1st Section of Tokyo Stock Exchange.
Increased capital to 8.1 billion yen from 3.85 billion yen.
2004 May Increased capital to 8.95 billion yen from 8.1 billion yen.
2004 July ULVAC KOREA, Ltd. and ULVAC TOHOKU, Inc. jointly founded Ulvac Korea Precision, Ltd. in South Korea to manufacture large-substrate vacuum parts.
ULVAC KOREA, Ltd. and Vacuum Metallurgical Co., Ltd. jointly founded Pure Surface Technology, Ltd. in South Korea for surface treatment of parts used for film deposition equipment.
2004 August Established ULVAC-TTI Technology (Shanghai) Corporation, a company jointly invested in by Reliance Electric Limited and TAIWAN DEVELOPMENT CO.,LTD, in China to manufacture and sell control boards and automatic control and drive systems.
2004 December Increased capital to 13.468 billion yen from 8.95 billion yen.
2005 January Established ULVAC Tianma Electric (Jingjiang) Co., Ltd., a company jointly invested in by ULVAC KIKO, Inc. and JIANGSU SHANGQI GROUP CO.,LTD., in China to manufacture and sell vacuum pump parts.
Established ULVAC Vacuum Furnace (Shenyang) Co., Ltd. (currently, ULVAC (Shenyang) Co., Ltd) in China to manufacture and sell vacuum furnaces.
Made ULVAC Orient (Chengdu) Co., Ltd.
2005 April Vacuum Metallurgical Co., Ltd. merged with ULVAC Materials Technology Co.,Ltd. and the company name was changed to ULVAC Materials, Inc.
Took over the equipment business of FUJITSU VLSI LIMITED in order to expand the flat panel display business.
2005 June Additionally constructed the Hyeon-gok Plant of ULVAC KOREA, Ltd. to increase production.
Set up the Reliance Evaluation Center at the Miyazaki Office of ULVAC KIKO, Inc. to evaluate and verify small vacuum pumps.
2005 November Acquired stocks (50%) of Litrex Corporation that Cambridge Display Technology Limited, a British company, owned in order to wholly own Litrex.
Established ULVAC (THAILAND) LTD. in Thailand for sales and field support.
2005 December Established ULVAC Taiwan Manufacturing Corporation in Taiwan to manufacture equipment for manufacturing flat panel displays. Also established ULTRA CLEAN PRECISION TECHNOLOGIES CORP. in Taiwan to provide field support such as processing and wet cleaning of parts.
2006 March Established ULVAC (CHINA) HOLDING CO., LTD. to manage and control subsidiaries in China.
2006 April Established ULVAC AUTOMATION TAIWAN Inc. in Taiwan to manufacture control boards and other products.
2006 July Established ULVAC Research Center KOREA, Ltd. in South Korea for research and development.
Established ULVAC Research Center TAIWAN, Inc. in Taiwan for research and development.
2006 August Acquired stocks (70%) of Sigma-Technos Co. Ltd., which manufactured and sold precision stages.
Established ULVAC MALAYSIA SDN. BHD. in Malaysia for sales and field support.
2006 September Established the Chemical Center of ULVAC TECHNO, Ltd. in Chigasaki City, Kanagawa Prefecture, for surface treatment of vacuum equipment parts.
Established the Miyazaki Office of ULVAC KIKO, Inc. in Saito City, Miyazaki Prefecture, to concentrate production of small vacuum pumps.
2006 November Established the Aichi Plant in Kasugai City, Aichi Prefecture, to increase the capacity to produce equipment for manufacturing flat panel displays.
2007 June Established ULVAC, Inc. India Branch. to expand business in India.
2007 September Established a new head office and plant of Sigma-Technos Co., Ltd. in Hidaka City, Saitama Prefecture, to manufacture and sell large precision stages.
2007 November The company name of ULVAC-TTI Technology (Shanghai) Corporation was changed to ULVAC Automation Technology (Shanghai) Corporation with the transfer of the stocks owned by TAIWAN DEVELOPMENT CO.,LTD.
2008 February Established ULVAC YME, Inc. (currently ULVAC ENGINEERING, Inc.) for design and outsourcing development.
2008 July Established ULVAC Human Relations, Ltd., which specialized in field support.
2008 August ULVAC TAIWAN INC. merged with ULVAC Taiwan Manufacturing Corporation to streamline business operations in Taiwan, with ULVAC TAIWAN INC. as the surviving company.
2008 August Established ULVAC Materials Korea, Ltd in South Korea to manufacture sputtering targets and for bonding.
2008 October The sputtering target materials business of ULVAC Materials, Inc. was transferred to our company to produce sputtering target materials more effectively and improve development systems. The wet cleaning business was transferred to ULVAC TECHNO, Ltd. and ULVAC KYUSHU CORPORATION to improve support systems for the wet cleaning business.
2009 April Established ULVAC Materials (Suzhou) CO., LTD in China to manufacture sputtering targets and for bonding.
2009 April Established ULVAC Opto-electronics Thin Film Technology (Shenzhen) Co., Ltd. in China to manufacture touch panels.
2009 June Litrex Corporation was dissolved to develop the display business in East Asia in a more flexible way. The business was handed over to us.
2009 December Established ULVAC Research Center SUZHOU Co., Ltd. in China for research and development.
2010 January Increased capital to 20.873 billion yen from 13.468 billion yen.
2010 March Relocated the Chiba institute for Super Materials to the Tomisato Industrial Park to enhance research and development.
2010 October Acquired ULVAC Materials, Inc. The service, wet cleaning, and surface treatment businesses of ULVAC KYUSHU CORPORATION were transferred to ULVAC TECHNO, Ltd. In addition, ULVAC KYUSHU CORPORATION acquired ULVAC Seiki Co., Ltd.
2011 July Established the South Korea Institute for Super Materials as a research institute attached to ULVAC KOREA, Ltd. to enhance research and development in South Korea.
2012 June ULVAC CORPORATE CENTER Ltd. was dissolved. The business was handed over to us.
2012 July The japanese trade name of ULVAC EQUIPMENT SALES, Inc. was changed, to enhance sales systems.
2012 September Sigma-Technos Co, Ltd., was dissolved.
2013 October Some stocks (equivalent to 80%) of Reliance Electric Limited were transferred to TAKAOKA ELECTRIC MFG. CO., LTD.
2014 June ULVAC Research Center TAIWAN, Inc. was dissolved. The business was handed over to ULVAC TAIWAN INC.
2014 June Established ULVAC VACUUM EQUIPMENT (SHANGHAI) CO.,LTD in China to stock and sell imported parts under bond.
2014 December All stocks of ULVAC-RIKO,Inc.(Current ADVANCE RIKO,Inc.) were transferred to CHINO CORPORATION.
2015 Janualy ULVAC ENGINEERING, Inc. was dissolved.
2016 December We took over ULVAC Vacuum Furnance (Shenyan) Co., Ltd. (currently, ULVAC (Shenyang) Co., Ltd.