Development of Mass Production Technologies for SiC Power Devices at ULVAC

1.Introduction

Power electronics play an essential role in the construction of smart cities and as part of the solution to global warming. Power electronics are used to convert and control electric power in various applications, such as electric trains, automobiles, solar cells, and air conditioners. Power devices, the key component of power electronics, are required to deliver high performance, such as low power loss and high switching speed. Development of Mass Production Technologies for SiC Power Devices at ULVAC