Backing plates are one of the components of a sputtering cathode. It is shaped to fit the target and attached on the backside of the target. … What are backing plates?
What is ion implantation?
Ion implantation is a method of implanting impurities to a semiconductor substrate by ionizing the substance or impurities and accelerating the ion into the substrate. … What is ion implantation?
What is ion beam milling?
Ion beam milling is a technique in which the convex parts of a film is flattened and scraped off by an ion beam. … What is ion beam milling?
Process technology for Waveguide
Introducing the dry etching technology required for the optical waveguide process.
… Process technology for Waveguide
Waveguide fabrication flow
An optical waveguide is a transmission line that uses light for communication. Quartz-based optical waveguides are basically manufactured using quartz-based glass film deposition technology and etching micromachining technology.
… Waveguide fabrication flow
Process technology for VCSEL
Introducing the dry etching technology required for the VCSEL process.
… Process technology for VCSEL
VCSEL fabrication flow
The market for semiconductor lasers is becoming active as a light source for 3D sensing technologies such as LiDAR, which are required for autonomous driving. As one of them, we will introduce a dry process for VCSELs (Vertical Cavity Surface Emitting Laser), which has merits such as miniaturization and energy saving.
… VCSEL fabrication flow
Process technology for MicroLED
Introducing the sputtering and etching technologies required for the MicroLED process.
… Process technology for MicroLED
MicroLED manufacturing
MicroLED is a technology for refining LEDs used as light sources such as lighting and applying them to displays, and is expected as a technology to realize the next generation of displays of liquid crystal and organic EL. ULVAC provides technologies such as ITO sputtering and etching for the MicroLED manufacturing process.
… MicroLED manufacturing
Process Technology for Wafer-level Packaging (WLP)
Introducing the sputtering, etching, and ashing technologies required for the WLP process.
… Process Technology for Wafer-level Packaging (WLP)