Waveguide fabrication flow

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An optical waveguide is a transmission line that uses light for communication. Quartz-based optical waveguides are basically manufactured using quartz-based glass film deposition technology and etching micromachining technology.

Waveguide fabrication flow​​​​​

1. Forming Core & Bottom Clad

Forming Core layer and Clad layer.

2. Forming Mask

Form a mask pattern to form the epi layer into a column called a mesa

3. Photolithography

4. Mask process

Etching Hard mask(Cr,Ni)

Process technology for Waveguide


5. Removing PR

6. Core

Etching Core with hardmask

Process technology for Waveguide

7. Removing hardmask

8. Forming Above clad

9. Electrode

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