2021年2月18日2021年2月18日Process flow Waveguide

Waveguide fabrication flow

This post is also available in: Japanese Chinese (Simplified)

An optical waveguide is a transmission line that uses light for communication. Quartz-based optical waveguides are basically manufactured using quartz-based glass film deposition technology and etching micromachining technology.

Waveguide fabrication flow

	1. Forming Core & Bottom Clad Forming Core layer and Clad layer.
	2. Forming Mask Form a mask pattern to form the epi layer into a column called a mesa
	3. Photolithography
	4. Mask process Etching Hard mask（Cr,Ni) Process technology for Waveguide
	5. Removing PR
	6. Core Etching Core with hardmask Process technology for Waveguide
	7. Removing hardmask
	8. Forming Above clad
	9. Electrode