This post is also available in: Japanese Chinese (Simplified)
MicroLED is a technology for refining LEDs used as light sources such as lighting and applying them to displays, and is expected as a technology to realize the next generation of displays of liquid crystal and organic EL. ULVAC provides technologies such as ITO sputtering and etching for the MicroLED manufacturing process.
MicroLED manufacturing process
 |
1. PSS & Buffer layer formedThe surface of the board is etched to create a conical shape and increase the reflectance. In addition, by providing an AlN buffer layer, uniform crystal growth and a smooth surface can be obtained. |
 |
2. EPI & Transparent conductive layer formedEPI layer formation by MOCVD and transparent electric film (ITO) by sputtering are formed. |
 |
3. Transparent conductive layer patternedParticle control is important when processing ITO films. |
 |
4. Mesa + Isolation process |