μLED fabrication flow

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μLED is a technology for refining LEDs used as light sources such as lighting and applying them to displays, and is expected as a technology to realize the next generation of displays of liquid crystal and organic EL. ULVAC provides technologies such as ITO sputtering and etching for the μLED manufacturing process.

μLED fabrication flow

1. PSS & Buffer layer formed

The surface of the board is etched to create a conical shape and increase the reflectance. In addition, by providing an AlN buffer layer, uniform crystal growth and a smooth surface can be obtained.

Process technology for μLED

2. EPI & Transparent conductive layer formed

EPI layer formation by MOCVD and transparent electric film (ITO) by sputtering are formed.

Process technology for μLED

3. Transparent conductive layer patterned

Particle control is important when processing ITO films.

Process technology for μLED

4. Mesa + Isolation process

Process technology for μLED

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