The ULVAC Group was honored with awards in three categories at the 2024 Awards presented by the Japan Vacuum Industry Association (JVIA).
Vacuum technology plays a vital role as a foundational technology across a wide range of industries, including semiconductors, displays, healthcare, and energy. Its advancement is essential to supporting the sustainable growth of these sectors.
The awards program recognizes outstanding initiatives and achievements in various fields that contribute to the development of vacuum technology.
The award ceremony was held on Friday, May 30, 2025.
| Awarded Project | Development of "VACAL®-Z" Surface Treatment for Vacuum Equipment Using Corrosive Gases |
|---|---|
| Company | ULVAC, Inc. |
| Awarded Project | Gv135 - An Oil Rotary Vacuum Pump for Analytical Instruments, Offering Ultra-Quiet Operation with No Oil Leakage |
|---|---|
| Company | ULVAC KIKO, Inc. |
| Awarded Project | Establishment of ISO Standards for Performance Measurement Methods of Cryopumps |
|---|---|
| Companies | Sumitomo Heavy Industries, Ltd., ULVAC CRYOGENICS INCORPORATED, CANON ANELVA CORPORATION |
Comment from the Recipient of the "Vacuum Components Grand Prize"
We are very honored to receive the prestigious Vacuum Components Grand Prize.
The award-winning technology is VACAL®-Z, a surface treatment developed for vacuum equipment that uses corrosive gases, such as CVD and etching systems.
Conventional porous anodic oxidation treatments (anodizing) have long been widely used. However, they face issues such as reduced corrosion resistance due to cracking in high-temperature areas and increased particle generation. VACAL®-Z was developed to overcome these challenges, offering excellent corrosion resistance and low outgassing performance.
Additionally, we have developed technologies that enable the surface treatment of large-scale vacuum equipment components, as well as regeneration treatment technologies that help reduce running costs. These innovations allow us to respond to a wide range of customer needs.
We would like to express our sincere gratitude to all those who contributed to the development and evaluation of this technology.
Moving forward, we will continue striving to create high-value technologies that meet the evolving needs of our customers.
For further information
ULVAC, Inc. web_info
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