Language:日本語

ULVAC offers technical solutions for the production of power devices.
ULVAC is the industry leader in the delivery of systems for SiC and Si.

SiC

Si

High-temp Ion Implanter for SiC
IH-860DSIC

IH-860DSIC is high-volume and high temperature system specifically suited for the SiC industry.

Read More

IH-860DSIC

Load-lock type Sputtering System
CS-200

Sputtering system CS 200 is for research & development and small production application.

Read More

CS-200

Dry Etching System for Production
NE-5700/NE-7800

Multifilm Dry Etching sytem designed for high volume manufacturing. Flexible configuration with low cost of ownership.

Read More

NE-5700/NE-7800

Ashing Systems
Luminous NA Series

NA series ashing system is a multi-substrate flexible ashing system which can be used for next generation and wafer level packaging processes.

Read More

Luminous NA Series

Cluster-type Sputtrering System
SME-200E

Cluster type system which can be used for various types of deposition.(Metal, PZT,BST, AIN, SiNx,AI203)
Supports transfer chamber and various types of depositions.

Read More

SME-200E

Batch-type High Vacuum Evaroration System
ei Series

Ei Series is a high vacuum evaroration system for the deposition of metal and oxide on a substrate.
Since the operation panel of this system has an integrated control function that realizes automated vacuum and deposition process, it is recommended for R&D use as well as for small-scale manufacturing.

Read More

ei Series

Medium Current Ion Implanter
SOPHI-200/260

The SOPHI-260 system is built upon existing medium ion implanter technology. However, the system has been designed to reduce cost and still provide a high-quality system with parallel scan capability.

Read More

SOPHI-200/260

High-energy Ion Implanter
SOPHI-400

SOPHI-400, cluster type high-energy Ion Implanter, has no mass separator and supports thin wafers.

Read More

SOPHI-400

Low-acceleration and High-density Ion Implanter
SOPHI-30

SOPHI-30, low-acceleration and high-density ion implanter, is cluster type and supports thin wafers.

Read More

SOPHI-30

Backside Metalization Sputtering System
SRH Series

SRH Series is a high volume PVD system for the deposition of metallic films required in the power device, WL-CSP, UBM or similar applications.

Read More

SRH Series
Inquiry about Advanced Package Device Solution