ULVAC offers technical solutions for the production of power devices.
ULVAC is the industry leader in the delivery of systems for SiC and Si.
Batch-type High Vacuum Evaroration System
Ei Series is a high vacuum evaroration system for the deposition of metal and oxide on a substrate.
Since the operation panel of this system has an integrated control function that realizes automated vacuum and deposition process, it is recommended for R&D use as well as for small-scale manufacturing.