Batch-type High Vacuum Evaroration System ei Series|Vacuum Evaporation System|Products|ULVAC, Inc.
Vacuum Evaporation System

Batch-type High Vacuum
Evaroration Systemei Series

This is a batch type high vacuum evaporation system for the deposition of metal and oxide on a substrate. Since the operation panel of this system has an integrated control function that realizes automated vacuum and deposition process, it is recommended for R&D use as well as for small-scale manufacturing.


  • Supports various evaporation sources (i.e. EB, RH, EB + RH etc.).
  • Substrate holders complying with each process (i.e. lift-off, planetary, satellite etc.).
  • Supports various substrates; substrates size from φ2in to 6in, rectangular substrates, Si, compounds, glass and ceramics.
  • Display and operation on LCD touch panel.
  • Superior PC-operating system and functions (recipe function, data logging, maintenance assist function).


  • Compound-related devices of Power devices
  • LED, LD and high-speed devices
  • Various R&Ds
  • Other general electronic devices

This website use cookies to obtain and use access data to understand the convenience and usage of customers. If you agree to use cookies, click "I Accept".
[Privacy Plicy] [Cookie Policy]

I Accept