Vox(IR sensor) fabrication flow

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Infra-red sensor (IR-) is an important sensor for realizing visualization in the dark night, and it can detect the heat of the object, so it can visualize obstacles (animals with a heat source, etc.) even in the dark night.
There is a technology that uses conventional amorphous silicon (Amorphous Silicon, a-Si), but in recent years, a new material, vanadium oxide (VOx), has been attracting attention in order to achieve higher performance. .. Since the resistance of VOx changes due to heat, the resistance change is large, and the linearity is high, it is expected that noise can be reduced compared to the conventional infrared sensor using amorphous silicon.

IR sensor fabrication flow


1. SiN deposition (PECVD)


2. Vox Deposition(Sputtering)

Providing sputtering technology to ensure stable resistance value

Process Technology for VOx


3. SiN Deposition (PECVD)


4. Vox Etching (RIE)


5. SiN Etching (RIE)


6. Al Deposition (Sputtering、Evaporation)

7. SiN Deposition (PECVD)

8. Separation (RIE)

9. Diaphragm (Ashing : 250℃)

Process Technology for VOx

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