Process Technology Vox(IR sensor)

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Introducing the Vox sputtering technology required for IR sensor production and the ashing technology required for sacrificial layer removal.

Vox　Sputtering

Achieves sputtering technology that ensures stable resistance

 

 

 Removing sacrifice layer

 

 

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https://www.ulvac.co.jp/en/contact/elec_inquiry/

Vox (IR sensor) fabrication flow

https://www.ulvac.co.jp/wiki/en/process_g_vox/