Top | Glass substrate | Flexible Substrate |
ULVAC Solutions for Touch Screen "Flexible Substrate" |
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For the purpose of manufacturing Touch Screen, we provide the sputtering system for thin film deposition on Flexible-substrate.
Moreover, High Grade ITO Film making use of original process has been developed, as well. |
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ULVAC has newly developed a composite ITO film making sure of transparency. |
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ULVAC's Sputtering System for Flexible Substrate |
Sputtering Coating Machine (Roll Coater Type) |
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・ | Various modules for different processes and production volumes |
・ | Excellent gas separation performance and improved sputtering process enable rapid deposition of high grage films applications. |
・ | Transparent conductive films: touchi panel, conductive materials (PET/ITO) |
・ | AR, electromagnetic shielding films: PET/multilayer optical films, anti-reflective films. |
・ | Othe: high barrier films, organic films, etc. |
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Deposition Chamber Expansion (from 1 to 3 chambers) |
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・ | Acceptance up to four cathode pairs (8 targets) per MR (main roll) to deposit ITO, SiO2, Nb2O5 or other films onto a 1600-mm wide, 25 to 200 μm thick PET or PC substrate with a roll diameter of 900 mm. |
・ | Optical monitor, resistance monitor and atmospheric monitor. |
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Application Roadmap |
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