144 「Rough and Middle Vacuum Pump」 Manual/Spec sheet was found.
![](https://www.ulvac.co.jp/download/wp-content/uploads/DAT-50DA100SA-21585-2-01-8_EN-pdf-212x300.jpg)
Instruction manual_DAT-50DA.100SA
1.47 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DAT-50DEP100SEP_21510-2-01-6_EN-pdf-212x300.jpg)
Instruction manual_DAT-50DEP.100SEP
1.35 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DOP-40D.80S_23400-2-01-12_EN-pdf-212x300.jpg)
Instruction manual_DOP-40D.80S
1.12 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DOP-80SP_23700-2-01-11_EN-pdf-212x300.jpg)
Instruction manual_DOP-80SP
1.22 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DOP-120SXY_28111-2-01-3_EN-pdf-212x300.jpg)
Instruction manual_DOP-120SX.Y
2.44 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DOP-181SABCDE_20025-2-01-5_EN-pdf-212x300.jpg)
Instruction manual_DOP-181S
1.54 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DOP-301SBSVB_20D00-2-01-3_EN-pdf-212x300.jpg)
Instruction manual_DOP-301SB.SVB
2.19 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DOP-400SB_20B00-2-02-5_EN-pdf-212x300.jpg)
Instruction manual_DOP-400SB
1.99 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DOP-81SP_2002800-2-01-2_EN-pdf-212x300.jpg)
Instruction manual_DOP-81SP
1.94 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DOP-81SP-ABCDE_2002810-2-01-3_EN-pdf-212x300.jpg)
Instruction manual_DOP-81SP-ABCDE
2.62 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DOP-Quattro_28200-2-03-8_EN-pdf-212x300.jpg)
Instruction manual_DOP-Quattro
3.00 MB [pdf]
![](https://www.ulvac.co.jp/download/wp-content/uploads/DTC-22-22K_2001700-2-01-7_EN-pdf-212x300.jpg)
Instruction manual_DTC-22.22K
1.48 MB [pdf]