Language：日本語
High pumping speed
High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced.
Low power consumption
ECO-SHOCK technology realizes low power consumption. (C Type)
Power consumption at the ultimate pressure is the industry-leading 0.6kW or less.(LS120A-C)
Low noise
Built-in silencer achieves the noise level 61dB(A) or less.
Low running-cost
No shaft sealing gas.
*Purge gas is available with L Type.
- C Type : Clean process (LS***A-C)
- Feature : Low power consumption model (with built-in ECO-SHOCK)
Applications : For clean process such as air and N2
Sputtering / Vapor deposition / Lamination / Load lock room /
TMP backing pump etc. - L Type : Light process (LS***A-L)
- Features : Light process model (with surface treatment and purge function)
Applications : For light process such as steam and volatile liquid medicine
Vacuum drying / Freeze drying / Ashing / General industrial use etc.
Difference in pumping speed
Influence on pumping down time
Condition
Chamber : 100L Piping : 2inches, 1m Target pressure : From ATM to 10Pa
*This data is a calculated value.It may differ from the actual condition under the influence of the discharge Gas etc.
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