High pumping speed
High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced.
Low power consumption
ECO-SHOCK technology realizes low power consumption. (C Type)
Power consumption at the ultimate pressure is the industry-leading 0.6kW or less.(LS120A-C)
Built-in silencer achieves the noise level 61dB(A) or less.
No shaft sealing gas.
*Purge gas is available with L Type.
Difference in pumping speed
Influence on pumping down time
Chamber : 100L Piping : 2inches, 1m Target pressure : From ATM to 10Pa
*This data is a calculated value.It may differ from the actual condition under the influence of the discharge Gas etc.