Dry Vacuum Pump LS Series features

High pumping speed

High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced.

Low power consumption

ECO-SHOCK technology realizes low power consumption. (C Type)

Power consumption at the ultimate pressure is the industry-leading 0.6kW or less.(LS120A-C)

Low noise

Built-in silencer achieves the noise level 61dB(A) or less.

Low running-cost

No shaft sealing gas.

*Purge gas is available with L Type.

2 types for specific application

C Type : Clean process (LS***A-C)
Feature : Low power consumption model (with built-in ECO-SHOCK)
Applications : For clean process such as air and N2
       Sputtering / Vapor deposition / Lamination / Load lock room /
       TMP backing pump etc.
L Type : Light process (LS***A-L)
Features : Light process model (with surface treatment and purge function)
Applications : For light process such as steam and volatile liquid medicine
       Vacuum drying / Freeze drying / Ashing / General industrial use etc.

for more details

LS Series exhaust performance

Difference in pumping speed

Influence on pumping down time


Chamber : 100L Piping : 2inches, 1m Target pressure : From ATM to 10Pa

*This data is a calculated value.It may differ from the actual condition under the influence of the discharge Gas etc.

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