No.81 August/2017

1. G10.5 Sputtering 装置「SMD3400」の開発

執筆者 超材料研究所 水野 雄介 他
概要 “SMD 3400” is the large-scaled sputtering system, manufactured and developed for use in Generation 10.5 (G10.5), which mother glass size is approximately 3400×3000 mm, for TFT-LCD production line. ”SMD 3400” is composed of Loading/Unloading position, Loading/Unloading chamber, heating chamber and 2 sputtering chambers. Planer targets of Cu and ITO are mounted respectively on the sputtering chamber in multi-cathode systems. This sputtering system has improved horizontal wave-formed thickness uniformity problem depends on the cathode arrangement by using new-type deposition method, although conventionally film thickness become thicker right in front of the target and thinner at between the targets. This new-type deposition method has successfully introduced to “SMD2400”so far, which established massproduction technology to improve luminance unevenness in display due to horizontal wave-formed thickness uniformity. We investigated film thickness uniformity, Rs uniformity, reflectance (for Cu), transmittance (for ITO) and film stress in the Cu and ITO process using “SMD3400”. We obtaind film thickness uniformity less than 10% in both process as we expected by the simulation. We confirmed new-type deposition method improve Rs horizontal distribution. And good Rs uniformity, reflectance, transmittance and film stress were obtained at G10.5 substrate area.

2. スパッタプロセスを用いた高抵抗透明電極の開発

執筆者 超材料研究所 高橋 明久 他
概要 For the In-Cell type touch screen panel, a high resistivity transparent electrode that can work as anti-static without affecting touch sensing is required. ULVAC selected Sputtering Process which is high in productivity and suitable for large size and successfully developed a high resistivity transparent conductive oxide electrode satisfying required specification.

3. ナノメタルインクを用いた配線形成技術とグラビアオフセット印刷による透明電極の形成

執筆者 未来技術研究所 橋本 夏樹 他
概要 We introduce silver nanoparticle ink, namely nanometal ink, which is essential for printed electronics. In recent, flexibility is required in the field of transparent  electrodes for future flexible devices. Although indium tin oxide (ITO) is the most widespread material as transparent electrode, its lack of adequate flexibility and poor conductivity restrain from further development for future devices. We have attempted to make patterns of invisible and high conductive fine silver electrodes by a gravure offset printing method to meet both of transparency and flexibility. Here, silver nanoparticle ink was developed and applied to fabricate fine invisible silver electrodes with the line width of 5 μm. The fabricated electrode pattern of which the line/space is 5 μm / 300 μm has excellent electric conductivity and transparency. The patterned electrode has sheet resistance of sub-10 Ω/ □ , while its transparency is higher than 90.

4. 量子ドット蛍光体の結晶成長と光電変換デバイスへの応用

執筆者 未来技術研究所 長久保 準基 他
概要 In order to obtain semiconductor quantum dots with superior opto-electronic performance, several technologies are  required including epitaxial growth, fine particle size control, and ligand control. We have synthesized quantum dot phosphors via these technologies. The quantum dot phosphors showed better color purity (full width at half maximum: 45.0 nm, chromaticity coordinates: 0.177, 0.688) than conventional phosphors such as β -SiAlON. A photoelectric converter using these quantum dots has been fabricated, which shows 16.7% of external quantum efficiency at 850 nm of infrared  light. The result indicates a possibility of developing superior infrared image sensor than conventional organic CMOS image sensors.

5. 水晶発振式成膜コントローラ・有機材料向け4 MHz 水晶板の開発

執筆者 規格品事業部 伊藤 敦
概要 A quartz crystal microbalance (QCM) is typically used to monitor the vapor deposition of organic materials, and QCM  sensors feature a quartz crystal resonator with a resonance frequency of 5 or 6 MHz. When a metal or oxide film forms on  a sensor, the rate at which the material adheres varies little. When an organic film forms on a sensor, however, the rate at which the material adheres varies considerably. This causes a problem since it greatly reduces the life of the quartz crystal resonator. The current work used several quartz crystal resonators with different fundamental frequencies to measure electrical and temperature characteristics during formation of an organic film. Results indicated that a quartz cr ystal resonator with a resonance frequency of 4 MHz or lower was better suited to sensing vapor deposition of an organic material than a resonator with a resonance frequency of 5 or 6 MHz.

6.革新的な進化を遂げたTOF-SIMS スペクトル解析「パラレルイメージングMS/MS」

執筆者 アルバック・ファイ株式会社
分析室 飯田 真一 他
概要 Recently, the applications of TOF-SIMS have expanded into a wide variety of organic materials, because the sensitivity of high mass molecular ions was improved dramatically. However, it was very difficult to determine the chemical formula from the measured mass above m/z 200. The ambiguous peak identification was a significant problem in TOF-SIMS. In order to determine the chemical formula as well as detailed chemical structure, we developed the TOF-SIMS instrument equipped
with Tandem MS (MS/MS), and applied it to analysis of various organic materials. In this article, we will introduce this unique instrument, and demonstrate the results of the spectra analysis using MS/MS.