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Parts Supply

We offer High quality, low cost, prompt and steady delivery of vacuum consumable parts and materials to users all over the world.

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Various consumables for thin film deposition system


Silicon Parts (Electrode Outer)

Quartz Parts (Ring Shield)

Susceptor

Backing Plate

Shield

Parts for Vacuum Gauge/Thickness controllers


Vacuum Gauge Heads/
Various Vacuum Introduction Terminals

Thickness Controller Parts

Vacuum Parts Supplies and Accessories, etc.


Bellow

Bellow

Oil for Rotary Vacuum Pumps

Oil for Rotary Vacuum Pumps
Grease Specifically Made for Vacuum Equipment

Oil Mist Trap

Maintenance Parts for Vacuum Pumps

Part Supplies and Ac

Oil Mist Traps for Small-size Vacuum Pumps
 

ULVAC’S Field Service Network >>

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