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Field Services for Equipment

We offer an initial set-up and operation, field service, CIP (Continuous Improvement Program), material recycling.

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Filed SirvicesGlobal CIPFactory Outsourcig(FOS)Reccling/Cleaning/Reusing Resources

Prompt and quality maintenance services on a global scale.

Worldwide services for upgrading existing equipment.

A service for supporting factory operations to achieve manufacturing and developmental goals.

Material recycling through cleaning, resource recovery and recycling equipment parts.

Field Service

1.On-Site Service Engineers
Technicians are on duty to inspect whether the product line is properly functioning, and to replace parts such as inner jigs and evaporation sources.
2.A wealth of Experience and Expertise
Our service ranges from preventive maintenance, overhauls, repairs, remodeling, relocation, disposal to overall maintenance.

ULVAC’S Field Service Network >>

Global CIP

ULVAC promotes a unique and innovative plan called CIP(Continuous Improvement Program) whose services include the upgrading of existing equipment.
To increase the yield rate and improve productivity, it is essential to utilize existing line equipment for generations to come. This plan is not for only equipment used in Japan, but also for those used overseas.

1.Meating Demands of Next Generation Process
By adding and renewing hardware and software to the latest version you can get the benefits of the newestyour current equipment at an affordable price.
2.Improving Productivity, Yield Rate, Process Capability, and Operating Rate
By adding the latest technology elements or renewing certain functions or units, yield and operation rate of your equipment will improve. Furthermore, we will help you raise productivity of existing line equipment by setting the system up or narrowing it down to functions to fit your needs.
3.Upgrading and Retrofitting
Upgrading existing equipment by adding new functions will make your system meet newest technologistandards, and improve its control software.
4.Contribution and Dedication to Environment-friendly
By renewing certain products, or by switching just the hardware and software, you can change your existing equipment to more energy-saving devices.
We also suggest renewal of your equipment units and parts to meet RoHS regulations.

Factory Outsourcing (FOS)

A service for supporting factory operations to achieve manufacturing anddevelopmental goals.

We suggest unique plans that meet your demands.

1.Man power at the initial start-up of production line
2.On-site services that require technical knowledge or skills (e.g. initial start-up of machine)
3.Line operators
4.Machine upkeep and maintenance
5.Comprehensive management of pump overhauls
6.Selection of model types and support for process development

Recycling/Cleaning/ReusingResources

Meating Demands for Large-size Parts
From regular cleaning, blast cleaning to assembling, we meet demands for large-size equipment
Treatment Facilities
ULVAC has many treatment facilities in Asia
that has many device company.
Please inquire a nearby service center.
ULVAC’S Field Service Network >>
Case1: Ultra Clean Treatment
  • Low outgas/ low dust
  • The Anchor effects enable lengthening intervals of cleaning and longevity of parts due to decreased amount of deposition film peel off
  • ULVAC’s original spray coating technique
  • A perfect solution to satisfy your need

Shield ring (1)

Platten ring

Shield ring (2)
Case2: Cleaning for Organic EL (Clean Harmless Treatment)

ULVAC has developed a cleaning method for organic EL device process called “Clean Harmless Treatment”.
This new cleaning technology will support customer’s requirements.

Reusing Resources (Au)


-cleaner and longevity of parts
-recyclable deposited film
-less damages to the environment
Case3: Reycling fo Sputtering Targets
At ULVAC, resource recovery, recycling and reuse of valuable rare metals are implemented in a proactive manner to pursue efficient use of sputtering targets.

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