Sputtering System
Load-lock type
Sputteing System for
Load-lock type
Sputteing System for
Optical Filters and CoatingULDiS Series
The ULDiS series is the digital sputtering system that has enhanced the Meta Mode and realized the high-quality optical filters and coatings.
ULVAC has signed a License Agreement with JDS Uniphase Corporation of the U.S.
; License MetaMode® sputter for optical application. The ULDiS comes available to be placed at your business, and develops widely.
Features
- Coating of the filters of good spectrum characteristics.
- Low processing temperature.
- Prevent arching plasma by double cathodes; AC sputtering.
- Precisely reproducible coating thickness.
- A wide variety of options including low-damage cathode.
Applications
- IR Cut-off Filter for digital cameras
- Dichroic filter for projectors
- Mirror Coating for DVD
- Other optical filters including Anti-reflection Coatings