Cluster-type Sputtrering SystemSME-200E|Sputtering System|Load-lock type|Products|ULVAC, Inc.
Sputtering System
Load-lock type

Sputtrering SystemSME-200E

SME-200E is cluster type Sputtering system for research and development and production purpose.


  • Substrate size up to Φ200mm.
  • Process chamber up to three process chamber can be equipped.
  • Available for various application-specific process modules.
  • Substrate heating mechanism, simultaneous deposition and revolved deposition are available.


  • R&D
  • Production purpose

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