The LX-200 series is a vapor deposition sputtering composite system that can perform Li vapor deposition and sputtering of various materials for rechargeable batteries. It can be used at development sites.
Type | LX-200E | LX-200S | LX-200ES | |
Substrate size | Max 200mm□ | |||
Deposition area | Max 180mm□ | |||
Chamber configuration | 1)Loading/Unloading chambers | 1 | 1 | 1 |
2)Transfer chambers | 1 | 1 | 1 | |
3)Evaporation chambers (Crucible, Depo up) | 1 | 0 | 1 | |
4)Sputter chambers (Depo up, Max 4 cathodes) | 0 | 1 | 1 |
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