Loadlock Deposition SystemLX-200 Series|Sputtering System|Load-lock type|Products|ULVAC, Inc.
Sputtering System
Load-lock type

Loadlock Deposition SystemLX-200 Series

The LX-200 series is a vapor deposition sputtering composite system that can perform Li vapor deposition and sputtering of various materials for rechargeable batteries. It can be used at development sites.

Feature

  • Capable of sputtering insitu before and after Li deposition
  • Space-saving design
  • Selectable DC and RF power sources for deposition materials
  • Capable of deposition on 200 mm□ size substrates

End Use

  • Battery R&D

Specification

Type LX-200E LX-200S LX-200ES
Substrate size Max 200mm□
Deposition area Max 180mm□
Chamber configuration 1)Loading/Unloading chambers 1 1 1
2)Transfer chambers 1 1 1
3)Evaporation chambers (Crucible, Depo up) 1 0 1
4)Sputter chambers (Depo up, Max 4 cathodes) 0 1 1

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