Single-substrate Sputtering Systems SMD Series|Sputtering System|In-line type|Products|ULVAC, Inc.
Sputtering System
In-line type

Single-substrate
Sputtering SystemsSMD Series

The SMD Series are single-substrate sputtering systems for deposition of films such as metal films and ITO films. ULVAC has delivered a large number of these systems, for use in a wide range of production environments. ULVAC responds rapidly to feedback from production sites to improve the reliability of these models.

Features

  • Substrate-only transfer and side deposition method enable low particle generation.
  • Space-saving design
  • Individual substrates can easily be managed using parameters such as deposition conditions.
  • Different cathodes are available for deposition of different substances.
  • Wide range of deposition processes are supported, based on ULVAC's abundant experience and data.

Applications

  • Thin-film transistors (TFTs)

Specifications

Type G4.5 G5 G5.5
SMD-950 SMD-950X3 SMD-1200CX SMD-1500X
Cluster-type X-type
Substrate size (mm) 730 X 920 1200 X 1300 1300 X 1500
Chamber configuration 1) Loading/unloading chambers 2
2) Heating chambers 1 -
3) Transfer chambers 1
4) Sputter chambers 4 2 (Up to 2 cathodes) 2 (Up to 3 cathodes) 2 (Up to 2 cathodes)
High vacuum evacuation system Cryopump
Substrate transfer system 1-level arm 2-level arm 2-level arm

This website use cookies to obtain and use access data to understand the convenience and usage of customers. If you agree to use cookies, click "I Accept".
[Privacy Plicy] [Cookie Policy]

I Accept