Sputtering System
In-line type
Vertical-type
In-line type
Vertical-type
Sputtering SystemsSMD Series
The SMD series is an inline type sputtering system for forming metal films, ITO, IGZO, dielectric films, etc. Vertical-type sputtering systems are mainly used for large displays.
Features
- High productivity
- Individual substrates can easily be managed using parameters such as deposition conditions.
- Different cathodes are available for deposition of different substances.
- Wide range of deposition processes are supported, based on ULVAC's abundant experience and data.
(More than 1300 sales record of the SMD series)
Applications
- TFT (Thin-film transistor) for large displays
Specifications
| Type | G8.5~G8.6 | G10.5 | |
| SMD-2400F | SMD-3400 | ||
| Substrate size (mm) | 2200 × 2500 ~ 2290 × 2620 | 2940 × 3370 | |
| Deposition method | Side deposition method substrate-fixed deposition | ||
| Chamber configuration | 1) Loading/Unloading position | 1 | |
| 2) Loading/Unloading chambers | 1 | ||
| 3) Heating chambers | 1 | ||
| 4) Sputter chambers | Max 4 | ||
| High vacuum evacuation system | Turbo pump | ||
| Substrate transfer system | Tray ＋ magnetic levitation transfer system | ||