Sputtering System
Batch type
Batch type
Batch-type Sputtering Systems SV Series
Vertical batch-type sputter systems. Series models include the SV-200 disk stamper model, and carousel types for large-volume substrate processing.
Features
- SV-4540, 6040 and 9045 are carousel types that can load a large volume of substrates. They are ideal for small- to medium-scale production, or for low-volume production of many different substrate types.
- SV-200 is a system specialized for disk stamper Ni deposition. It features an ultra-compact design, fully-automatic operation and high throughput.
Applications
- Deposition of electrode films, insulating films or dielectric films on various substrates
Specifications
| SV-200 | SV-4540 | SV-6040 | SV-9045 | |
| Standard evacuation system | 8-inch cryopump | 12-inch cryopump | 12-inch cryopump | 16-inch cryopump |
| Final pressure | 6.7e-5Pa | 6.7e-5Pa | 6.7e-5Pa | 6.7e-5Pa |
| Deposition direction | Side | Side | Side | Side |
| Deposition area uniformity Static Rotary | Φ200mm ± 5% | L300mm ± 10% | L300mm ± 10% | L400mm ± 10% |
| Substrate heating | None | 250°C | 250°C | 250°C |
| Control system | Automatic | Automatic | Automatic | Automatic |
| Options (except SV-200) | Turbo pump | Drainage cold electrode |
| Oil diffusion pump | APC mechanism | |
| Simultaneous multi-source deposition | Substrate reversing mechanism | |
| Down deposition | Reactive sputter | |
| Conventional cathode | ||
| Cathode for strong magnets | ||
| RF etch cleaning (SV-4540) | ||
| Bias mechanism (SV-4540) |