BAW Device manufacturing

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A BAW device is a filter that extracts electrical signals in a specific frequency band by using the bulk vibration of a piezoelectric material.

	1. Bottom electrode
	2. Bottom electrode etching
	3. Forming Piezo film Sputtering for（Sc)AlN Process Technology for BAW device
	4. Etching Piezo film Providing etching technology that minimizes the amount of digging of the base electrode Process Technology for BAW device
	5. Top electrode
	6. Top electrode etching
	7. Isolation layer
	8. Isolation layer etching
	9. Backside Via Notch free process Process Technology for BAW device
	10. Forming Contact electrode High productivity with liftoff evaporation Process Technology for BAW device

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