Sputtering Targets for Total Material Support of Thin Film Solar Cell Manufacturing Equipment
Besides promoting widespread use of its turn-key or “ready-to-go” thin-film solar cell manufacturing equipment, ULVAC also provides sputtering targets made from materials ideal for passivation, buffer and electrode layers in amorphous silicon solar cells and compound semiconductor (CIGS) solar cells. ULVAC responds to needs for transparent, electrically conductive films widely used not only in solar cells but also in FPD and touch panels. It provides for example, GZO and AZO thin films using zinc that is a plentiful resource compared to ITO by utilizing an all-inclusive integrated system ranging R&D, to production engineering, and global supply.
Targets for Solar Cells
|AZO (3N-)||Transparent conductive films|
|GZO (3N-)||Transparent conductive films|
|Ag (4N)||Reflective film electrode materials|
|Ti (3N-)||Electrode material protection films|
|Al alloy (5N)||Wiring materials|
|ITO (4N)||Transparent conductive films|
|Si (5N-)||Passivation films|
|SiO2 (4N)||Passivation films|
|Mo (3N)||Electrode materials|
|ZnO (3N)||Transparent conductive films|
Recycling of Sputtering Targets
At ULVAC, resource recovery, recycling and reuse of valuable rare metals are implemented in a proactive manner to pursue efficient use of sputtering targets.