To develop and produce high quality sputtering targets, ULVAC carefully evaluates which manufacturing method to use for each material to meet the product quality goals “Low particle” “Good film uniformity” “High usage efficiency”.
Large Sizes & Diverse Display Types In the FPD (Flat Panel Display) Market, We Constantly Work to Maintain a Stable, High-Quality Material Supply.
Sputtering targets must meet ever tougher standards for high quality to produce sub-micron scale and wafer targets in ever larger sizes.
Our high-purity vacuum deposition materials are being used in all fields involving thin film electronic devices. Vapor deposition materials manufactured in a clean environment and under a sophisticated quality assurance system provide our customers with complete satisfaction.
ULVAC manufactures and sells IGZO targets, which are used in IGZO TAOS (transparent amorphous oxide semiconductors in which In, Ga, Zn, and O are used).