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High Performance Materials
Columns [Ta] [Nb] [Zr]
External appearance of Zr lining
External appearance of Zr lined mirror
ULVAC’s columns make full use of lining techniques, and offer excellent cost performance.
Features of ULVAC’s lining method
- Thermal stress is taken into consideration and the structure can endure repetitive long-term operation at any temperature—from very high temperatures to room temperature.
- The plates of the columns are thinner than those made using the explosion clad method, which allows cost reductions.
- The structure is capable of withstanding a vacuum state.