High Performance Materials
Columns [Ta] [Nb] [Zr]


External appearance of Zr lining

External appearance of Zr lined mirror
ULVAC’s columns make full use of lining techniques, and offer excellent cost performance.
Features of ULVAC’s lining method

- Thermal stress is taken into consideration and the structure can endure repetitive long-term operation at any temperature—from very high temperatures to room temperature.
- The plates of the columns are thinner than those made using the explosion clad method, which allows cost reductions.
- The structure is capable of withstanding a vacuum state.
