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Vapor Deposition Polymerization System

Vapor deposition polymerization technology has become the subject of attention across a variety of fields, from electronic parts to biocompatible materials. ULVAC offers deposition technologies for high-performance, high-reliability organic films with excellent coatability.

Organic/Inorganic Compound Deposition Systems
VEP Series


VEP Series models are systems for deposition of various organic and inorganic materials by methods including evaporation, sputtering, plasma metallization and evaporation metallization. Process chambers can be freely selected to match the application.

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