ULVAC offers vacuum furnaces (for melting, thermal treatment, and CVD) used in general industrial fields and semiconductor/electronic device fields.
Since the first unit was produced in 1957, ULVAC has delivered over 200 vacuum induction melting furnaces to customers in Japan and around the world. These furnaces are contributing to a wide range of industry applications such as specialized steel, electronics materials and new materials. They have been used in developing new technologies such as high-vacuum degassing and refining using cryopanels, and multi-element alloys created by single-direction agitation systems. ULVAC can also provide equipment lines and production technology for rare-earth magnet manufacturing.
FHV series are used for various purposes such as quenching, tempering and brazing of various metals. Vertical two-chamber configuration which consists of heating chamber + preparation/cooling contributes to space saving by adopting elevation mechanism. Temperature data from heating process to cooling process can be seamlessly recorded for quality control of products.