Vacuum Furnace

ULVAC offers vacuum furnaces (for melting, thermal treatment, and CVD) used in general industrial fields and semiconductor/electronic device fields.

Vacuum Sintering Furnaces
FSC Series


Vacuum sintering technology has growing industrial and consumer applications. The performance of rare-earth magnets has increased in recent years, enabling their use in computer drive motors and medical magnetic resonance equipment. Tantalum capacitors are also used in mobile phones.

Batch-type Vacuum Heat Treatment Furnace


It is applicable to wide range vacuum heat treatments such as quenching,annealing,tempering, sintering,brazing etc for various metal parts.

Vacuum Brazing Furnaces
FB Series


The FB Series are systems for brazing heat exchangers such as EGR coolers, radiators and evaporators. The wide array of models available ranges from batch types to continuous types, and models for processing special items can also be made to order.

Horizontal Type Vacuum Heat Treatment Furnace
FHH series


FHH series are used for various purposes such as quenching, tempering, sintering and brazing of various metals. Chamber configuration can be multiplied up to 3 chambers by adopting fork carry system.

Hot Roller Type Vacuum Heat Treatment Furnace
FHHn series


FHH series are used for various purposes, such as tempering, sintering, brazing of various types of metal.

Vacuum Induction Melting Furnaces
FMI Series


Since the first unit was produced in 1957, ULVAC has delivered over 200 vacuum induction melting furnaces to customers in Japan and around the world. These furnaces are contributing to a wide range of industry applications such as specialized steel, electronics materials and new materials. They have been used in developing new technologies such as high-vacuum degassing and refining using cryopanels, and multi-element alloys created by single-direction agitation systems. ULVAC can also provide equipment lines and production technology for rare-earth magnet manufacturing.

Vertical Type Vacuum Heat Treatment Furnace
FHV Series


FHV series are used for various purposes such as quenching, tempering and brazing of various metals. Vertical two-chamber configuration which consists of heating chamber + preparation/cooling contributes to space saving by adopting elevation mechanism. Temperature data from heating process to cooling process can be seamlessly recorded for quality control of products.

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