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SX Series

Sputtering System

Batch-type Sputtering System
SX Series

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sx-200

Batch-type Sputtering System SX series is for batch type sputtering system for research & development and small production application.

Features

  • Auto control for vacuum pumping and deposition by PC
  • Designed for co-sputtering method application (optional item by adding power supply)
  • Logging data by PC

Applications

  • Reserch and development
  • Small and medium production

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