The STD Series are in-line sputtering systems for deposition of ITO films and other metal films. They can be used to deposit films such as low-resistance ITO films, transparent conductive films, and multilayer optical film for touch panel metal wire films.
|Effective area||1200mm H x 1500mm L||1550mm H x 1300mm L||1900mm H x 1550mm L|
|Standard tact time||30 sec / 45 sec / 60 sec|
|Substrate heating||RT. 120ºC / 230ºC / 300ºC|