EQUIPMENT

Top > EQUIPMENT > Sputtering Coating Machine (Roll Coater Type)
SPW Series

Roll Coater

Sputtering Coating Machine (Roll Coater Type)
SPW Series

For more Information

SPW165

SPW Series is a equipment that can be sputtered optical thin film and metal etc multilayer film on plastic film.

Gas separation chanber for batch processing of high-function multilayer films.

Features

【SPW-030】

  • Various modules for different processes and production volumes.
  • Can be applied to various applications by selecting and adding modules.
  • Can be operated at floor level.
  • Excellent gas separation performance and improved sputtering process enable rapid deposition of high grade films.

【SPW-165】

  • Various modules for different processes and production volumes.
  • Can be applied to various applications by selecting and adding modules.
  • Can be operated at floor level.
  • Excellent gas separation performance and improved sputtering process enable rapid deposition of high grade films.

Applications

  • FPD reflection-reducing films/transparent electrode films/shield films/high barrier films
  • FPC electrode films
  • Magnetic films/protective films for magnetic recording media

Specifications

SPW-030 SPW-060 SPW-165 C1 SPW-165 C2
Target Material ITO, Nb2O5, SiO2, Cu and Metal
Web Width Max300mm Max750mm Max1600mm
Web Thickness(μm) 25 to 200
Web Material PET, PI, PC, COP and Others
W/UW Max Diameter φ300mm φ400mm /φ700mm φ900mm
Winding Speed(m/min) 0.5 to 5.0 0.1 to 10 0.5 to 10
Cathode Structure External External / Internal Internal
Number of Cathode 4sets 8sets 16sets
4Pair 8Pair
Power Supply DC or AC
Numbar of Main Roller 1set 2sets
MR Temp -5 to 180ºC -20 to 80ºC -20 to 100ºC
-10 to 180ºC
Option Bombard system, Ion Gun and Others

For more Information